Patents by Inventor Jong-Chul Kin

Jong-Chul Kin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature-adjusting unit, substrate processing apparatus with the unit, and method of regulating temperature in the apparatus
    Patent number: 7637114
    Abstract: A substrate processing apparatus includes: a processing room in which a semiconductor substrate may be treated by a process; a cooling unit positioned to cool the processing room, the cooling unit configured to convey cooling fluid; and a temperature-adjusting unit that alters the temperature of the cooling fluid supplied into the cooling unit. The temperature-adjusting unit has a cycling circuit. The cycling circuit has a compressor configured to compress a refrigerant, a condenser configured to condense the compressed refrigerant, an expander configured to expand the condensed refrigerant, the expander including a plurality of expansion valves arranged in parallel, and an evaporator configured to evaporate the expanded refrigerant, the evaporator positioned to cool the cooling fluid.
    Type: Grant
    Filed: May 19, 2006
    Date of Patent: December 29, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Dong-Hyun Choi, Moon-Soo Park, Jong-Chul Kin, Yong-Dae Kim
  • Temperature-adjusting unit, substrate processing apparatus with the unit, and method of regulating temperature in the apparatus
    Publication number: 20060266060
    Abstract: A substrate processing apparatus includes: a processing room in which a semiconductor substrate may be treated by a process; a cooling unit positioned to cool the processing room, the cooling unit configured to convey cooling fluid; and a temperature-adjusting unit that alters the temperature of the cooling fluid supplied into the cooling unit. The temperature-adjusting unit has a cycling circuit. The cycling circuit has a compressor configured to compress a refrigerant, a condenser configured to condense the compressed refrigerant, an expander configured to expand the condensed refrigerant, the expander including a plurality of expansion valves arranged in parallel, and an evaporator configured to evaporate the expanded refrigerant, the evaporator positioned to cool the cooling fluid.
    Type: Application
    Filed: May 19, 2006
    Publication date: November 30, 2006
    Inventors: Dong-Hyun Choi, Moon-Soo Park, Jong-Chul Kin, Yong-Dae Kim