Patents by Inventor Jong-Eun SHIN

Jong-Eun SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD, DEVICE AND SYSTEM FOR ENRICHMENT OF NF3 GAS
    Publication number: 20160083254
    Abstract: Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.
    Type: Application
    Filed: September 17, 2015
    Publication date: March 24, 2016
    Inventors: Dong-Won LIM, Jong-Eun SHIN, Youn-Joong KIM, Hyun-Jun KIM, Sang-Yup LEE