Patents by Inventor Jong Goo Won

Jong Goo Won has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Moving head for semiconductor wafer polishing apparatus
    Patent number: 7294041
    Abstract: Disclosed herein is a moving head for a semiconductor wafer polishing apparatus. The semiconductor wafer polishing apparatus has a table on which a polishing pad is formed, and the moving head mounted via a support unit to hold a wafer relative to a polishing surface of the table. In this case, the moving head includes a sensing means having a load cell and a piezoelectric sensor to measure pressing force and frictional force acting on the wafer provided in the moving head. The present invention relates to the polishing of a semiconductor wafer material from which an integrated circuit is made.
    Type: Grant
    Filed: September 15, 2006
    Date of Patent: November 13, 2007
    Assignee: Inha-Industry Partnership Institute
    Inventors: Eun Sang Lee, Jong Goo Won, Jung Talk Lee