Abstract: Provided is an apparatus for treating a substrate, the apparatus including: an equipment front end module including a load port and a transfer frame; a process chamber for performing a process treatment on a substrate; and a load lock chamber disposed in a transfer path of the substrate transferred between the transfer frame and the process chamber, in which the load lock chamber includes: a housing having an interior space; a compartmentalizing plate for compartmentalizing the interior space into a first space, and a second space independent of the first space; and an aligning unit for aligning a notch of the substrate provided in any one of the first space and the second space.

Abstract: An energy storage module includes: a plurality of battery cells arranged in a first direction such that long side surfaces of adjacent ones of the battery cells face one another; a plurality of insulation spacers, at least one of the insulation spacers being between each adjacent pair of the battery cells, each of the insulation spacers including a heat-insulating first sheet and a plurality of flame-retardant second sheets respectively adhered to opposite surfaces of the first sheet by an adhesion member; a cover member including an internal receiving space configured to accommodate the battery cells and the insulation spacers; a top plate coupled to the cover member, the top plate including ducts respectively corresponding to vents of the battery cells and having fire extinguishing agent openings respectively corresponding to the insulation spacers; a top cover coupled to the top plate and having discharge openings respectively corresponding to the ducts; and an extinguisher sheet between the top cover and

Abstract: An energy storage module includes: a cover member accommodating a plurality of battery cells in an internal receiving space, each of the battery cells including a vent; a top plate coupled to a top of the cover member and including a duct corresponding to the vent of at least one of the battery cells; a top cover coupled to a top of the top plate and having an exhaust area corresponding to the duct, the exhaust area having a plurality of discharge openings, the top cover including a protrusion protruding from a bottom surface of the top cover, the protrusion extending around a periphery of the exhaust area and around a distal end of the duct; and an extinguisher sheet between the top cover and the top plate, the extinguisher sheet being configured to emit a fire extinguishing agent at a reference temperature.

Abstract: An apparatus of tilting a seat cushion of a vehicle, includes a tilting motor, a pinion gear, a sector gear, and a tilting link which perform the tilting operation of the seat cushion and exert a binding force in a tilted state of the seat cushion and are provided to be connected to both of one side and the other side of a seat cushion frame, and has two sector gears positioned on left and right sides and connected to each other by a connection bar so that, by strengthening a binding force of the front portion of the seat cushion, it is possible to secure the safety of passengers in the event of a collision.

Abstract: A method for fabricating semiconductor device includes forming an alternating stack that includes a lower multi-layered stack and an upper multi-layered stack by alternately stacking a dielectric layer and a sacrificial layer over a substrate, forming a vertical trench that divides the upper multi-layered stack into dummy stacks, and forming an asymmetric stepped trench that is extended downward from the vertical trench to divide the lower multi-layered stack into a pad stack and a dummy pad stack, wherein forming the asymmetric stepped trench includes forming a first stepped sidewall that is defined at an edge of the pad stack, and forming a second stepped sidewall that is defined at an edge of the dummy pad stack and occupies less area than the first stepped sidewall.

Abstract: A case for a secondary battery. The case for a secondary battery has a space in which an assembled battery unit including a positive electrode plate, a separator, and a negative electrode plate, is accommodated, and sealing portions welded along the periphery of the space, wherein at least one notch is present in the sealing portions.

Abstract: A method for manufacturing a case for a secondary battery includes preparing a case material in a plate state; setting a plurality of sections on the case material, each section including parts for forming a pan for a battery main body, a gas receiving portion disposed at a side of the pan, a path connecting the pan and the gas receiving portion, and a cover portion covering the pan and the gas receiving portion together; forming the pan of the battery main body, the gas receiving portion, and the path by molding the case material; and severing each section from the case material.

Abstract: A case for a secondary battery includes a pan having a space for accommodating a battery main body and an opening. A first bonding portion extends along the edge of the pan. A second bonding portion extends along the edge of the cover portion for corresponding attachment to the first bonding portion when folded onto the pan. Thus, mass production of the case is possible and the bonding portion becomes firm when the first and second bonding portions are bonded together.