Abstract: A substrate processing apparatus may be utilized, for example, for a horizontally fixed organic material deposition equipment for manufacturing large-area displays. A substrate processing apparatus may include a titanium cooling plate having an upper surface and a lower surface; an electrostatic chuck including a first dielectric layer provided on the lower surface, an electrode layer provided on the first dielectric layer, and a second dielectric layer provided on the first dielectric layer and the electrode layer, and chucking a glass substrate using an electrostatic force; and a yoke plate positioned on the upper surface and chucking a mask using a magnetic force. The titanium cooling plate may further includes a first channel provided from the upper surface, a second channel provided from the first channel, and a titanium cover plate coupled to the first channel. The titanium cooling plate may provide a cooling flow path using the second channel.

Abstract: The present invention provides a soil ball for water purification with increased hardness and microbial population. According to the soil ball for water purification with increased hardness and microbial population of the present invention, the addition of a hardener increases the hardness such that the degradation of the soil ball in water is delayed, and the addition of a buffer solution prevents an increase in pH to increase the microbial population, thus improving the effect of water purification.