Patents by Inventor Jong Hwan Ahn

Jong Hwan Ahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for detecting arcs
    Patent number: 8332170
    Abstract: The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.
    Type: Grant
    Filed: May 3, 2010
    Date of Patent: December 11, 2012
    Assignee: Hwaback Engineering Co., Ltd.
    Inventors: Kang Lee, Sang Jeen Hong, Sang Youl Lee, Jong Hwan Ahn
  • APPARATUS FOR DETECTING ARCS
    Publication number: 20110090503
    Abstract: An apparatus for detecting arc that can monitor inside of process chamber sensitively and promptly can be provided, and abnormal condition of plasma in process chamber can be detected. And, by installing RGB sensor portion independently or installing the RGB sensor portion in master board, flexibility in configuration can be provided.
    Type: Application
    Filed: May 3, 2010
    Publication date: April 21, 2011
    Inventors: Kang LEE, Sang Jeen HONG, Sang Youl LEE, Jong Hwan Ahn
  • APPARATUS AND METHOD FOR DETECTING ARCS
    Publication number: 20110040508
    Abstract: The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.
    Type: Application
    Filed: May 3, 2010
    Publication date: February 17, 2011
    Inventors: Kang LEE, Sang Jeen HONG, Sang Youl LEE, Jong Hwan AHN