Abstract: Provided is a method and an apparatus for dry-cleaning an aluminum nitride (AlN) heater for semiconductor fabrication equipment, which may efficiently remove fluorine-containing contaminants generated on the AlN heater during semiconductor fabrication processes, and especially, may effectively and simultaneously remove organic, inorganic metallic, and inorganic contaminants. The method for dry-cleaning an AlN heater for semiconductor fabrication equipment includes steps of: determining a laser to be used for the AlN heater; determining laser control factors required for cleaning the AlN heater with respect to the laser to be used determined in the step of determining the laser to be used; and cleaning the AlN heater by laser irradiation based on the laser control factors determined in the step of determining the laser control factors.

Abstract: The present invention relates to a system for corneal crosslinking of injured corneas, treating keratoconus, or correcting vision, the system comprising: a hyaluronic acid-dye conjugate; and a contact lens including an LED light source. In the present invention, a dye is activated by receiving light irradiated from the LED light source of the contact lens so as to generate radicals, thereby generating a covalent bond between amino acid radicals of corneal collagen, and strengthening a collagen layer. In the present invention, the hyaluronic acid-dye conjugate, in which hyaluronic acid is bound to the dye, is used to improve penetration of the dye in the cornea, and the contact lens is used together with the hyaluronic acid-dye conjugate to further improve the penetration of the dye. In addition, the structure of the lens which presses the center of the cornea deforms the shape of the cornea, thereby having a vision correction effect.

Abstract: Provided is a method and an apparatus for dry-cleaning an aluminum nitride (AlN) heater for semiconductor fabrication equipment, which may efficiently remove fluorine-containing contaminants generated on the AlN heater during semiconductor fabrication processes, and especially, may effectively and simultaneously remove organic, inorganic metallic, and inorganic contaminants. The method for dry-cleaning an AlN heater for semiconductor fabrication equipment includes steps of: determining a laser to be used for the AlN heater; determining laser control factors required for cleaning the AlN heater with respect to the laser to be used determined in the step of determining the laser to be used; and cleaning the AlN heater by laser irradiation based on the laser control factors determined in the step of determining the laser control factors.

Abstract: The present invention relates to a contact lens for diagnosis and treatment of dry eye syndrome. The contact lens, according to the present invention, may diagnose dry eye syndrome by means of a change in an electric current occurring as a result of a field effect when a dry eye syndrome biomarker binds to a probe, and when dry eye syndrome is diagnosed, generates an electric current so that a gold film blocking a drug reservoir melts by the electric current, thereby enabling the release of a drug to be controlled.

Abstract: The present invention relates to a system for corneal crosslinking of injured corneas, treating keratoconus, or correcting vision, the system comprising: a hyaluronic acid-dye conjugate; and a contact lens including an LED light source. In the present invention, a dye is activated by receiving light irradiated from the LED light source of the contact lens so as to generate radicals, thereby generating a covalent bond between amino acid radicals of corneal collagen, and strengthening a collagen layer. In the present invention, the hyaluronic acid-dye conjugate, in which hyaluronic acid is bound to the dye, is used to improve penetration of the dye in the cornea, and the contact lens is used together with the hyaluronic acid-dye conjugate to further improve the penetration of the dye. In addition, the structure of the lens which presses the center of the cornea deforms the shape of the cornea, thereby having a vision correction effect.