Abstract: An apparatus for treating waste water including: a first flocculation tank to which a first flocculant is provided to produce a first flocculated material in which fluorine in waste water introduced from a waste water storage part is coagulated; a second flocculation tank to which a second flocculant and carbon dioxide are provided to produce a second flocculated material in which the first flocculated material and residual fluorine in first outflow water introduced from the first flocculation tank are flocculated; a third flocculation tank to which a third flocculant is provided to produce a third flocculated material in which the first flocculated material and the second flocculated material in second outflow water introduced from the second flocculation tank are flocculated; a first sedimentation tank in which third outflow water introduced from the third flocculation tank is solid-liquid separated into first sludge containing the third flocculated material and first supernatant water; a nitrification tank

Abstract: Disclosed are wastewater treatment systems and methods for semiconductor fabrication process. The method comprises performing first concentration on wastewater discharged from a semiconductor process chamber, and performing second concentration on concentrated wastewater or at least a portion of the wastewater concentrated by the first concentration. The step of performing the first concentration includes performing in a first electrodialysis apparatus an ion exchange between the wastewater and first treatment water. The step of performing the second concentration includes allowing the concentrated wastewater to circulate in a second electrodialysis apparatus, allowing second treatment water to circulate in the second electrodialysis apparatus, providing a power to an anode and a cathode of the second electrodialysis apparatus to perform an ion exchange between the second treatment water and the concentrated wastewater, and joining a portion of the concentrated wastewater to the second treatment water.