Patents by Inventor Jong-Muk Kang

Jong-Muk Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for treating substrates
    Patent number: 7196011
    Abstract: The present invention relates to a polishing apparatus for polishing a workpiece such as a semiconductor wafer to a flat mirror finish, and more particularly to a polishing apparatus having a workpiece transfer robot for transferring a workpiece from one operation to the next. The polishing apparatus according to the present invention comprises a polishing section including a top ring for holding a workpiece to be polished and a turntable having a polishing surface for polishing a surface of the workpiece held by the top ring; a cleaning section including a cleaning device for cleaning the workpiece that has been polished in the polishing section; and a workpiece transfer robot for transferring the workpiece to be polished to the polishing section or for transferring the workpiece that has been polished to the cleaning section.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: March 27, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chan-Woo Cho, Jae-Phil Boo, Myung-Seok Kim, Jong-Muk Kang, Ik-Joo Kim, Jung-Hwan Sung, Ki-Hong Jung, Keon-Sik Seo
  • Apparatus and method for treating susbtrates
    Publication number: 20050153557
    Abstract: The present invention relates to a polishing apparatus for polishing a workpiece such as a semiconductor wafer to a flat mirror finish, and more particularly to a polishing apparatus having a workpiece transfer robot for transferring a workpiece from one operation to the next. The polishing apparatus according to the present invention comprises a polishing section including a top ring for holding a workpiece to be polished and a turntable having a polishing surface for polishing a surface of the workpiece held by the top ring; a cleaning section including a cleaning device for cleaning the workpiece that has been polished in the polishing section; and a workpiece transfer robot for transferring the workpiece to be polished to the polishing section or for transferring the workpiece that has been polished to the cleaning section.
    Type: Application
    Filed: January 13, 2005
    Publication date: July 14, 2005
    Inventors: Chan-Woo Cho, Jae-Phil Boo, Myung-Seok Kim, Jong-Muk Kang, Ik-Joo Kim, Jung-Hwan Sung, Ki-Hong Jung, Keon-Sik Seo