Patents by Inventor Jong Seung LIM

Jong Seung LIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • YIELD ANALYSIS SYSTEM AND METHOD USING SENSOR DATA OF FABRICATION EQUIPMENT
    Publication number: 20140358465
    Abstract: A system and method for analyzing a product fabrication process are disclosed. A product yield analysis system according to an exemplary embodiment of the present disclosure includes a data extraction unit that extracts sensor data from a plurality of sensors arranged in equipment for fabricating a product, a reference signal generation unit that generates a reference signal for each of the plurality of sensors from the sensor data, and a sensor detection unit that detects one or more sensors having a correlation with a yield of the product using the sensor data and the reference signal.
    Type: Application
    Filed: August 28, 2013
    Publication date: December 4, 2014
    Applicant: SAMSUNG SDS CO., LTD.
    Inventors: Kae Young SHIN, Jong Seung LIM, Dae Jung AHN, Seung Jai MIN, Jong Ho LEE