Patents by Inventor Jong-Woo Sun
Jong-Woo Sun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11837496Abstract: A substrate processing apparatus including a process chamber; a susceptor in the process chamber; and an inner edge ring and an outer edge ring on the susceptor, wherein the inner edge ring includes a semiconductor, the outer edge ring includes an insulator, an upper surface of the outer edge ring is at a higher level than an upper surface of the inner edge ring, and the outer edge ring has an overhang extending onto the inner edge ring.Type: GrantFiled: May 19, 2021Date of Patent: December 5, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong Woo Sun, Sung Moon Park, Je Woo Han, Kwang Nam Kim, Ho Chang Lee, Young Hoon Jeong, Masayuki Tomoyasu
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Patent number: 11791194Abstract: A substrate processing apparatus including a process chamber; a susceptor in the process chamber; and an inner edge ring and an outer edge ring on the susceptor, wherein the inner edge ring includes a semiconductor, the outer edge ring includes an insulator, an upper surface of the outer edge ring is at a higher level than an upper surface of the inner edge ring, and the outer edge ring has an overhang extending onto the inner edge ring.Type: GrantFiled: May 19, 2021Date of Patent: October 17, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong Woo Sun, Sung Moon Park, Je Woo Han, Kwang Nam Kim, Ho Chang Lee, Young Hoon Jeong, Masayuki Tomoyasu
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Publication number: 20230033091Abstract: A plasma processing apparatus may include a support configured to receive a substrate, a gas distribution plate (GDP) including a plurality of nozzles facing the support, a main splitter configured to supply a process gas, and an additional splitter configured to supply an acceleration gas or a deceleration gas. The plurality of nozzles may include a plurality of central nozzles, a plurality of outer nozzles, a plurality of middle nozzles configured to spray the process gas and the acceleration gas, a plurality of first nozzles, and a plurality of second nozzles.Type: ApplicationFiled: September 23, 2022Publication date: February 2, 2023Applicant: Samsung Electronics Co., Ltd.Inventors: Chan Hoon Park, Jung Hwan Um, Jin Young Park, Ho Yong Park, Jin Young Bang, Jong Woo Sun, Sang Jean Jeon, Je Woo Han
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Patent number: 11521836Abstract: A plasma processing apparatus includes a substrate chuck having a first surface for supporting a substrate, a second surface opposite to the first surface, and a sidewall, a focus ring for surrounding a perimeter of the substrate, and an edge block for supporting the focus ring. The edge block includes a side electrode on the sidewall of the substrate chuck and a bottom electrode on the second surface of the substrate chuck.Type: GrantFiled: May 9, 2019Date of Patent: December 6, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Eun-Woo Lee, Kyo-Hyeok Kim, Hyo-Sung Kim, Jong-Woo Sun, Seung-Bo Shim, Kyung-Hoon Lee, Jae-Hyun Lee, Ji-Soo Im, Min-Young Hur
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Patent number: 11521866Abstract: In a plasma processing method, a substrate is loaded onto a lower electrode within a chamber. A plasma power is applied to form plasma within the chamber. A voltage function of a nonsinusoidal wave having a DC pulse portion and a ramp portion is generated. Generating the voltage function may include setting a slope of the ramp portion and setting a duration ratio of the ramp portion to a cycle of the voltage function in order to control an ion energy distribution generated at a surface of the substrate. A bias power of the nonsinusoidal wave is applied to the lower electrode.Type: GrantFiled: March 11, 2021Date of Patent: December 6, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung-Yoon Song, Chan-Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Je-Woo Han, Jin-Young Park
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Patent number: 11501987Abstract: A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.Type: GrantFiled: March 12, 2021Date of Patent: November 15, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kwang-nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang-Rok Oh, Sung-Wook Jung, Nam-Young Cho, Jung-Pyo Hong
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Patent number: 11437222Abstract: A plasma processing apparatus includes a process chamber having an inner space, an electrostatic chuck in the process chamber and to which a substrate is mounted, a gas injection unit to inject a process gas into the process chamber at a side of the process chamber, a plasma applying unit to transform the process gas injected into the process chamber into plasma, and a plasma adjusting unit disposed around the electrostatic chuck and operative to adjust the density of the plasma across the substrate.Type: GrantFiled: August 26, 2020Date of Patent: September 6, 2022Assignee: Samsung Electronics Co., Ltd.Inventors: Jung-Pyo Hong, Jong-Woo Sun, Jung-Mo Sung
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Patent number: 11437264Abstract: A semiconductor processing apparatus includes a chamber housing, an electrostatic chuck disposed in the chamber housing, the electrostatic chuck being configured to hold a semiconductor wafer, an edge ring surrounding the electrostatic chuck, the edge ring including a ring electrode disposed within the edge ring, and a ring voltage supply configured to supply a ring voltage to the ring electrode, the ring voltage having a non-sinusoidal periodic waveform, wherein each period of the non-sinusoidal periodic waveform comprises a positive voltage applied during a first time period and a negative voltage applied during a second time period, and wherein the negative voltage has a magnitude that increases during the second time period.Type: GrantFiled: February 23, 2021Date of Patent: September 6, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung Mo Sung, Jong Woo Sun, Je Woo Han, Chan Hoon Park, Seung Yoon Song, Seul Ha Myung
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Patent number: 11289309Abstract: A plasma processing device is provided with a chamber including a space that is configured to perform a treatment process for a wafer. A supporting member is disposed inside of the chamber and configured to support the wafer. A gas supply unit is configured to inject a mixed gas in different directions toward the supporting member. The pressure of the mixed gas is increased by adding inert gas to reactive gas.Type: GrantFiled: May 9, 2019Date of Patent: March 29, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyung Jun Kim, Kwang Nam Kim, Sung Yeon Kim, Jong Woo Sun, Sang Rok Oh, Jung Pyo Hong
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Patent number: 11282678Abstract: According to a method of controlling uniformity of plasma, a first RF driving pulse signal including first RF pulses is generated by pulsing a first RF signal having a first frequency, and a second RF driving pulse signal including second RF pulses is generated by pulsing a second RF signal having a second, lower frequency. The first and second RF driving signals are applied to a top electrode and/or a bottom electrode of a plasma chamber. A harmonic control signal including harmonic control pulses is generated based on timing of the first and second RF pulses. A harmonic component of the first and second RF driving pulse signals is reduced via intermittent activation and deactivation of a harmonic control circuit as controlled by the harmonic control signal. The uniformity of plasma is improved through the control based on timings of the RF driving pulses.Type: GrantFiled: August 8, 2019Date of Patent: March 22, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dong-Hyeon Na, Seung-Bo Shim, Ha-Dong Jin, Min-Young Hur, Kyo-Hyeok Kim, Jong-Woo Sun, Jae-Hyun Lee
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Publication number: 20210272838Abstract: A substrate processing apparatus including a process chamber; a susceptor in the process chamber; and an inner edge ring and an outer edge ring on the susceptor, wherein the inner edge ring includes a semiconductor, the outer edge ring includes an insulator, an upper surface of the outer edge ring is at a higher level than an upper surface of the inner edge ring, and the outer edge ring has an overhang extending onto the inner edge ring.Type: ApplicationFiled: May 19, 2021Publication date: September 2, 2021Inventors: Jong Woo SUN, Sung Moon PARK, Je Woo HAN, Kwang Nam KIM, Ho Chang LEE, Young Hoon JEONG, Masayuki TOMOYASU
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Publication number: 20210202276Abstract: In a plasma processing method, a substrate is loaded onto a lower electrode within a chamber. A plasma power is applied to form plasma within the chamber. A voltage function of a nonsinusoidal wave having a DC pulse portion and a ramp portion is generated. Generating the voltage function may include setting a slope of the ramp portion and setting a duration ratio of the ramp portion to a cycle of the voltage function in order to control an ion energy distribution generated at a surface of the substrate. A bias power of the nonsinusoidal wave is applied to the lower electrode.Type: ApplicationFiled: March 11, 2021Publication date: July 1, 2021Inventors: Seung-Yoon SONG, Chan-Hoon PARK, Jong-Woo SUN, Jung-Mo SUNG, Je-Woo HAN, Jin-Young PARK
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Publication number: 20210202283Abstract: A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.Type: ApplicationFiled: March 12, 2021Publication date: July 1, 2021Inventors: Kwang-nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang-Rok Oh, Sung-Wook Jung, Nam-Young Cho, Jung-Pyo Hong
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Patent number: 11037806Abstract: In a plasma processing method, a substrate is loaded onto a lower electrode within a chamber. A plasma power is applied to form plasma within the chamber. A voltage function of a nonsinusoidal wave having a DC pulse portion and a ramp portion is generated. Generating the voltage function may include setting a slope of the ramp portion and setting a duration ratio of the ramp portion to a cycle of the voltage function in order to control an ion energy distribution generated at a surface of the substrate. A bias power of the nonsinusoidal wave is applied to the lower electrode.Type: GrantFiled: July 12, 2019Date of Patent: June 15, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung-Yoon Song, Chan-Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Je-Woo Han, Jin-Young Park
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Patent number: 11037766Abstract: A substrate support apparatus includes a substrate stage to support a substrate, and a ground ring assembly along a circumference of the substrate stage, the ground ring assembly including a ground ring body, the ground ring body having a plurality of recesses along a circumferential portion thereof, and a plurality of ground blocks movable to be received into respective recesses of the plurality of recesses, the plurality of ground blocks including a conductive material to be electrically grounded.Type: GrantFiled: February 6, 2019Date of Patent: June 15, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kwang-Nam Kim, Sung-Yeon Kim, Hyung-Jun Kim, Jong-Woo Sun, Sang-Rok Oh, Jung-Pyo Hong
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Publication number: 20210175110Abstract: A semiconductor processing apparatus includes a chamber housing, an electrostatic chuck disposed in the chamber housing, the electrostatic chuck being configured to hold a semiconductor wafer, an edge ring surrounding the electrostatic chuck, the edge ring including a ring electrode disposed within the edge ring, and a ring voltage supply configured to supply a ring voltage to the ring electrode, the ring voltage having a non-sinusoidal periodic waveform, wherein each period of the non-sinusoidal periodic waveform comprises a positive voltage applied during a first time period and a negative voltage applied during a second time period, and wherein the negative voltage has a magnitude that increases during the second time period.Type: ApplicationFiled: February 23, 2021Publication date: June 10, 2021Inventors: Jung Mo SUNG, Jong Woo SUN, Je Woo HAN, Chan Hoon PARK, Seung Yoon SONG, Seul Ha MYUNG
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Patent number: 11018046Abstract: A substrate processing apparatus including a process chamber; a susceptor in the process chamber; and an inner edge ring and an outer edge ring on the susceptor, wherein the inner edge ring includes a semiconductor, the outer edge ring includes an insulator, an upper surface of the outer edge ring is at a higher level than an upper surface of the inner edge ring, and the outer edge ring has an overhang extending onto the inner edge ring.Type: GrantFiled: September 4, 2019Date of Patent: May 25, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong Woo Sun, Sung Moon Park, Je Woo Han, Kwang Nam Kim, Ho Chang Lee, Young Hoon Jeong, Masayuki Tomoyasu
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Patent number: 10971382Abstract: A semiconductor manufacturing apparatus includes a loadlock module including a loadlock chamber in which a substrate container is received, wherein the loadlock module is configured to switch an internal pressure of the loadlock chamber between atmospheric pressure and a vacuum; and a transfer module configured to transfer a substrate between the substrate container received in the loadlock chamber and a process module for performing a semiconductor manufacturing process on the substrate, wherein the loadlock module includes a purge gas supply unit configured to supply a purge gas into the substrate container through a gas supply line connected to the substrate container; and an exhaust unit configured to discharge a gas in the substrate container through an exhaust line connected to the substrate container.Type: GrantFiled: January 11, 2019Date of Patent: April 6, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang-Rok Oh, Sung-Wook Jung, Nam-Young Cho, Jung-Pyo Hong
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Patent number: 10964578Abstract: A semiconductor processing apparatus includes a chamber housing, an electrostatic chuck disposed in the chamber housing, the electrostatic chuck being configured to hold a semiconductor wafer, an edge ring surrounding the electrostatic chuck, the edge ring including a ring electrode disposed within the edge ring, and a ring voltage supply configured to supply a ring voltage to the ring electrode, the ring voltage having a non-sinusoidal periodic waveform, wherein each period of the non-sinusoidal periodic waveform comprises a positive voltage applied during a first time period and a negative voltage applied during a second time period, and wherein the negative voltage has a magnitude that increases during the second time period.Type: GrantFiled: May 2, 2019Date of Patent: March 30, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jung Mo Sung, Jong Woo Sun, Je Woo Han, Chan Hoon Park, Seung Yoon Song, Seul Ha Myung
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Patent number: 10903053Abstract: A plasma processing apparatus includes a chamber, a window plate disposed in an upper portion of the chamber and having a fastening hole defined therein, an injector having a body part including a plurality of nozzles and configured to be fastened to the fastening hole, and a flange part extending radially from the body part to partially cover a bottom surface of the window plate when the body part is fastened to the fastening hole, and a stopper configured to be fastened to the body part on an upper surface of the window plate to hold the injector in the fastening hole when the body part is fastened to the fastening hole.Type: GrantFiled: August 23, 2019Date of Patent: January 26, 2021Inventors: Hak Young Kim, Jung Pyo Hong, Jong Woo Sun, Doug Yong Sung, Yong Ho Lim, Yun Kwang Jeon, Hwa Jun Jung