Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

Abstract: Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part connecting the first and second mass bodies to the first frame in a Y axis direction, respectively; a second flexible part connecting the first and second mass bodies to the first frame in an X axis direction, respectively; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other in the X axis direction; and a fourth flexible part connecting the first and second frames to each other in the Y axis direction, wherein the first frame has a thickness in a Z axis direction thinner than that of the second frame.

Abstract: There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.

Abstract: An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.

Abstract: Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.

Abstract: Disclosed herein is a micro electro mechanical systems (MEMS) device including: a mass body; a first fixed part provided at an outer side of the mass body; and a first flexible part having one end connected to a distal end of the mass body and the other end connected to the first fixed part, wherein the mass body is rotatably connected to the first flexible part.

Abstract: Disclosed are a headlight apparatus and a method of controlling the same. The headlight apparatus provided in a transportation includes a light source unit including at least one light source and emitting a light in a forward direction of the transportation, a light source driving unit supplying a driving current to the at least one light source included in the light source unit, and a control unit receiving information about a driving environment of the transportation and determining a driving condition of the light source unit by using the received information about the driving environment. The driving condition of the light source unit includes a driving current value corresponding to a brightness of the at least one light source included in the light source unit.

Abstract: The embodiment provides a wireless communication apparatus and a wireless communication method thereof. The wireless communication apparatus includes an antenna for receiving or transmitting a signal; a receiving unit for demodulating the reception signal received through the antenna; a transmitting unit for generating the transmission signal to be transmitted through the antenna; and a control unit for determining a strength of the reception signal received through the antenna in order to set a strength of the transmission signal based on the strength of the reception signal.

Abstract: Disclosed herein is an angular velocity sensor including: first and second mass bodies; a first frame provided at an outer side of the first and second mass bodies; a first flexible part respectively connecting the first and second mass bodies to the first frame; a second flexible part respectively connecting the first and second mass bodies to the first frame; a second frame provided at an outer side of the first frame; a third flexible part connecting the first and second frames to each other; and a fourth flexible part connecting the first and second frames to each other.

Abstract: Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane 110; a post 130 disposed under an edge 115 of the membrane 110; a stopper 140 disposed under the membrane 110 and disposed more inwardly than the post 130 so as to form a space 143 between the stopper 140 and the post 130; and a cap 150 disposed under the post 130 so as to cover the post 130, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined region 145 of the membrane 110 disposed above the space 143.

Abstract: Disclosed herein is a sensor including a mass body; a fixing part provided so as to be spaced apart from the mass body; a first flexible part connecting the mass body and the fixing part to each other in a Y-axis; and a second flexible part connecting the mass body and the fixing part to each other in an X-axis, wherein the first flexible part has a width in an X-axis direction larger than a thickness in a Z-axis direction, and the second flexible part has a thickness in a Z-axis direction larger than a width in a Y-axis direction.

Abstract: Disclosed herein is a sensor. A sensor according to the present invention includes a mass body, a fixing part disposed so as to be spaced apart from the mass body, a first flexible part connecting the mass body with the fixing part in a Y-axis direction, a second flexible part connecting the mass body with the fixing part in an X-axis direction, and a membrane disposed over the second flexible part and having a width in a Y-axis direction larger than a width in a Y-axis direction of the second flexible part. Here, a width of an X-axis direction of the first flexible part is larger than a thickness in a Z-axis direction thereof and a thickness in a Z-axis direction of the second flexible part is larger than a width in a Y-axis direction thereof.

Abstract: Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor according to a preferred embodiment of the present invention includes: a plate-shaped membrane; a mass body provided under the membrane; posts provided under an outside edge of the membrane and surrounding the mass body; a piezoelectric body formed on the membrane; sensing electrodes formed on the piezoelectric body; driving electrodes formed on an outer circumference of the sensing electrodes, wherein tri-axis angular velocity can be measured without time division by a driving control unit continuously applying first driving voltage and second driving voltage that are is AC driving voltage having a phase difference of 90°.

Abstract: Disclosed herein is an inertial sensor including: a membrane; first and second driving units provided in a first axis direction (an X axis direction) so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the first axis direction; and third and fourth driving units provided in a second axis direction (a Y axis direction) perpendicular to the first axis direction so as to be symmetrical to each other based on a predetermined point of the membrane to thereby vibrate while being expanded and contracted in the second axis direction, wherein the first and second driving units have different vibration frequencies so that they vibrate while being expanded and contracted in the opposite manner and then vibrate while being expanded and contracted in the same manner.

Abstract: Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.

Abstract: Disclosed herein is an inertial sensor. The inertial sensor includes a sensing unit and a driving-mass-position initialization module. The sensing unit includes a driving mass, a flexible board unit which displaceably supports the driving mass, and a support which supports the flexible board unit to allow the driving mass to move in a suspended state. The flexible board unit has driving electrodes which move the driving mass, and sensing electrodes which sense the movement of the driving mass. The driving-mass-position initialization module includes a position initialization member which reciprocates to initialize the position of the driving mass, and a coil unit which surrounds the position initialization member. An initialization-member-receiving depression is formed in the driving mass. The shape of the initialization-member-receiving depression corresponds to that of the position initialization member.

Abstract: Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.

Abstract: Disclosed herein is an inertial sensor including: a membrane; a mass body provided under the membrane; a plurality of patterned magnets provided under the mass body; and a magnetoresistive element provided to be spaced apart from the mass body and measuring static DC acceleration acting on the mass body through resistance changed according to magnetic fields of the plurality of patterned magnets. The plurality of patterned magnets and the magnetoresistive element are included, thereby making it possible to measure static DC acceleration (particularly, gravity acceleration) that is difficult to measure using an existing to piezoelectric element.