Abstract: A laser apparatus includes: a stage on which an object is loaded, where the stage defines a groove line which entirely overlaps a cutting line of the object in a plan view, and defining a first additional groove line which is at a periphery of the groove line, is spatially connected to the groove line, and is spaced apart from the cutting line in the plan view; a laser generating part which is arranged on the stage and emits a laser beam; and a scanner which is arranged on an optical path of the laser beam and radiates the laser beam toward the object.

Abstract: A laser device includes a laser source which emits a laser beam, a scanner located on a path of the laser beam emitted from the laser source to control the path of the laser beam, a lens module located on a path of a controlled laser beam to converge the laser beam, and a lens adaptor connecting the lens module to the scanner. The lens module includes a first lens part which accommodates a first lens, a second lens part which accommodates a second lens, and a connecting part located between the first lens part and the second lens part, where the connecting part has a longest diameter greater than a longest diameter of the first lens part and a longest diameter of the second lens part.

Abstract: A suction unit control method includes simulating an air flow about a suction port, through which fumes generated when a laser beam is radiated on a target substrate on a stage unit to cut the target substrate are sucked up, installing an air blower on three or four sides around a laser cutting end at a height close to the suction port, controlling on and off of first to fourth solenoid valves of the air blower based on a movement of the stage unit while performing laser cutting on the target substrate while moving the stage unit.

Abstract: A work table for laser processing include a lower plate including a first area and a second area surrounding at least a portion of the first area, a first plate disposed in the first area on the lower plate and having a polygonal shape in a plan view, and a second plate disposed in the second area on the lower plate and movable in the second area.

Abstract: A deposition substrate transferring unit that can deposit a deposition material at an exact location on a substrate, includes an electrostatic chuck that has a first surface to which a substrate is attached; and a carrier having a surface that combines with a second surface of the electrostatic chuck to move the electrostatic chuck in a first direction. The carrier includes accommodation parts disposed in empty space within the carrier, and supplementary ribs respectively formed on surfaces of the accommodation parts.

Abstract: A deposition substrate transferring unit that can deposit a deposition material at an exact location on a substrate, includes an electrostatic chuck that has a first surface to which a substrate is attached; and a carrier having a surface that combines with a second surface of the electrostatic chuck to move the electrostatic chuck in a first direction. The carrier includes accommodation parts disposed in empty space within the carrier, and supplementary ribs respectively formed on surfaces of the accommodation parts.