Abstract: Disclosed herein is a battery pack. The battery pack can include a plurality of battery cells, a pack case defining a housing configured to accommodate the battery cells, a first venting path extending across the pack case, and a second venting path extending along at least one peripheral side of the pack case. The first venting path can provide a conduit for a gas generated from any of the battery cells. The second venting path can be in fluid communication with the first venting path and an opening on the pack case such that the gas from the battery cells is configured to travel from the first venting path to the second venting path and to be discharged from the battery pack via the opening.

Abstract: Provided are a chemical liquid supply apparatus and a semiconductor processing apparatus. The chemical liquid supply apparatus, which supplies a chemical liquid to a process chamber during a semiconductor manufacturing process, may include a chemical liquid supply pipe in which the chemical liquid flows therein and of which a spray end, through which the chemical liquid is sprayed, extends into the process chamber, an external electrode disposed outside the chemical liquid supply pipe, and a power supply module configured to apply power to the external electrode.

Abstract: A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit includes a static electricity sensor between the first plate and the second plate.

Abstract: A sensor module for detecting a process environment in semiconductor equipment includes: a sensor body including a first plate and a second plate; and a sensor circuit unit in the sensor body, wherein the sensor circuit unit comprises a static electricity sensor between the first plate and the second plate.