Patents by Inventor Jong Pal Ahn

Jong Pal Ahn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate drying apparatus and method of substrate drying using the same
    Publication number: 20070157947
    Abstract: A substrate drying apparatus, including a cleaning bath having a liquid supply unit, a drying tank having a gas supply unit and at least one nozzle in fluid communication with the gas supply unit, and a transfer unit for transferring a substrate from the cleaning bath to the drying tank. The apparatus of the present invention may be used in a substrate drying method, including supplying alternating dry gas mixture and inert gas to dry a substrate.
    Type: Application
    Filed: January 3, 2007
    Publication date: July 12, 2007
    Inventors: Deok Ho Kim, Sung Ho Hong, Suk Hee Lee, Jong Pal Ahn