Abstract: A method of forming patterns includes: forming a hard mask layer on a target layer, coating a cleavage relief layer on the hard mask layer to fill cleavages generated in the hard mask layer, forming photoresist patterns on the cleavage relief layer, removing portions of the cleavage relief layer and portions of the hard mask layer using the photoresist patterns as a first etch mask to form hard mask patterns, removing portions of the target layer using the hard mask patterns as a second etch mask to form target layer patterns, and removing the hard mask patterns. The hard mask layer includes an amorphous carbon layer (ACL), and the cleavage relief layer includes a spin-on carbon (SOC) layer.

Abstract: An image fixing apparatus that senses temperature of a heater and controls the temperature accurately includes a pair of fixing rollers, a heater housed inside at least one of the pair of fixing rollers, and a sensor integrally formed with the heater to detect temperatures of the heater from a plurality of sensing positions. The sensor includes an array of sensing units connected in parallel to the plurality of sensing positions, and generates one sensing signal. An image forming apparatus includes the image forming apparatus. An image fixing temperature control method includes generating average temperature information of a heater; and controlling the driving of the heater based on the temperature information.

Abstract: An image fixing apparatus that senses temperature of a heater and controls the temperature accurately includes a pair of fixing rollers, a heater housed inside at least one of the pair of fixing rollers, and a sensor integrally formed with the heater to detect temperatures of the heater from a plurality of sensing positions. The sensor includes an array of sensing units connected in parallel to the plurality of sensing positions, and generates one sensing signal. An image forming apparatus includes the image forming apparatus. An image fixing temperature control method includes generating average temperature information of a heater; and controlling the driving of the heater based on the temperature information.