Abstract: Provided are cone penetrometers for measuring the impedance of the ground. In an embodiment, the cone penetrometer comprises an inner electrode, an outer electrode, an insulator layer and a penetrating rod. The inner electrode includes a cone, a first contact portion to which terminal cables of an impedance meter are connected, and a metal rod. The metal rod has a diameter smaller than that of the cone. The metal rod has a front end connected to the bottom of the cone and a rear end connected to the first contact portion. The outer electrode has an inner diameter smaller than the diameter of the cone and is in the form of a hollow tube accommodating the metal rod. The insulator layer is formed between the inner electrode and the outer electrode to prevent short circuits between the two electrodes. The penetrating rod is in the form of a hollow tube accommodating the outer electrode. The use of the cone penetrometers improves the accuracy and reliability of the measured results.

Abstract: A micromechanical device or microactuator based upon the piezoelectric, pyroelectric, and electrostrictive properties of ferroelectric thin film ceramic materials such as PZT. The microdevice has a device substrate and a deflectable component. The deflectable component is mounted for deflection on the device substrate and has a sensor/actuator. The sensor/actuator has first and second electrodes and a piezoelectric thin film disposed between the first and second electrodes. The thin film is preferably PZT. The sensor/actuator is disposed on a sensor/actuator substrate. The sensor/actuator substrate is formed of a material selected for being resistive to attack by hydrofluoric acid vapor. The invention also relates to a method for fabricating such micromechanical devices or microactuators.

Abstract: A PZT ferroelectric thin film is sputter deposited on an electrode without microcracks while avoiding oxygen and Pb ion deficiencies at the electrode interface by initially forming a buffer layer containing a sufficient amount of a volatile Pb component and a sufficient amount of oxygen to easily absorb the energy of sputter particles. The PZT ferroelectric thin film can also be deposited by laser ablation.