Patents by Inventor Joon Ho Joung

Joon Ho Joung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pre-heating dilution gas before mixing with steam in diffusion furnace
    Patent number: 6726468
    Abstract: Embodiments of the present invention are directed to apparatus and methods of supplying a diluted process gas into a diffusion furnace for forming an oxide layer on a substrate in the diffusion furnace. One or more inlet gases are supplied into a chamber, and are heated in the chamber to generate an oxidizing gas such as steam. A dilution gas is flowed through a dilution gas line which extends through the chamber to permit heating of the dilution gas by the heat in the chamber without mixing the dilution gas and the oxidizing gas in the chamber. The oxidizing gas and the heated dilution gas are mixed downstream of the chamber prior to entry into the diffusion furnace.
    Type: Grant
    Filed: September 25, 2002
    Date of Patent: April 27, 2004
    Assignee: SilTerra Malaysia Sdn. Bhd.
    Inventors: Kader Ibrahim, Umasangar V. Pillai, Joon Ho Joung
  • PRE-HEATING DILUTION GAS BEFORE MIXING WITH STEAM IN DIFFUSION FURNACE
    Publication number: 20040058287
    Abstract: Embodiments of the present invention are directed to apparatus and methods of supplying a diluted process gas into a diffusion furnace for forming an oxide layer on a substrate in the diffusion furnace. One or more inlet gases are supplied into a chamber, and are heated in the chamber to generate an oxidizing gas such as steam. A dilution gas is flowed through a dilution gas line which extends through the chamber to permit heating of the dilution gas by the heat in the chamber without mixing the dilution gas and the oxidizing gas in the chamber. The oxidizing gas and the heated dilution gas are mixed downstream of the chamber prior to entry into the diffusion furnace.
    Type: Application
    Filed: September 25, 2002
    Publication date: March 25, 2004
    Applicant: SilTerra Malaysia Sdn. Bhd.
    Inventors: Kader Ibrahim, Umasangar V. Pillai, Joon Ho Joung