Abstract: The present invention relates to a chromatic confocal sensor based on a geometrical phase lens, and provides a chromatic confocal sensor that can confirm a height of a specimen and a location of a height measurement point through a configuration of a simple device.

Abstract: A transparent specimen cutting method is provided using ultrafast laser and a dicing device for machining the transparent specimen. The cutting method includes forming a focal point by generating and focusing an ultrafast laser beam which has a pulse width of 10 fs-10 ps from a laser source and a center wavelength corresponding to the bandwidth of a transparent specimen, transmitting energy to the inside of the transparent specimen using the focused pulse laser beam by positioning the focal point of the pulse laser beam such that the focal point is positioned in an inner area on the inside of the both side surfaces of the transparent specimen, and generating and propagating cracks by relatively moving the focal point or the transparent specimen along a cut line in a desired shape such that cracks are propagated on the transparent specimen at a distance from the movement line of the focal point.

Abstract: The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.

Abstract: The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.