Abstract: Provided is a terminal device for providing location guidance, the terminal device including a wireless communication unit configured to detect at least one wireless repeater around the terminal device over a short-range communication, a control unit configured to acquire a vertical location of the terminal device based on identification information of the detected wireless repeater, a display unit configured to display the acquired vertical location, and a sensor unit configured to acquire motion information of the terminal device, in which the control unit outputs variation information regarding the displayed vertical location based on the acquired motion information.

Abstract: Provided are a plasma source coil for generating plasma and a plasma chamber using the same. The plasma source coil receives power from a power supplier to generate uniformly plasma in a predetermined reaction space. The plasma source coil includes m (here, m≧2, and m is an integer) unit coils, each of which has a number n of turns (here, n is a positive real number). The unit coils extend from a coil bushing, which is located in the center of the plasma source coil and has a predetermined radius, and are arranged in a spiral shape around the coil bushing.