Patents by Inventor Joong-Sung Kim

Joong-Sung Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photomask with overlay mark and method of fabricating semiconductor device
    Patent number: 7732105
    Abstract: Provided are a photomask and a method of fabricating a semiconductor device. The photomask includes a photomask substrate including a chip region and a scribe lane region, with an overlay mark formed in the scribe lane region. The overlay mark includes one or more sub-overlay marks. Each of the sub-overlay marks includes a plurality of unit regions sequentially connected to each other and having different widths, where the width of a given unit region is constant.
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: June 8, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Do-Yul Yoo, Ji-Yong You, Joong-Sung Kim, Hyung-Joo Youn
  • PHOTOMASK WITH OVERLAY MARK AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE
    Publication number: 20080014511
    Abstract: Provided are a photomask and a method of fabricating a semiconductor device. The photomask includes a photomask substrate including a chip region and a scribe lane region, with an overlay mark formed in the scribe lane region. The overlay mark includes one or more sub-overlay marks. Each of the sub-overlay marks includes a plurality of unit regions sequentially connected to each other and having different widths, where the width of a given unit region is constant.
    Type: Application
    Filed: July 13, 2007
    Publication date: January 17, 2008
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Do-Yul YOO, Ji-Yong YOU, Joong-Sung KIM, Hyung-Joo YOUN