Patents by Inventor Joost De Pee
Joost De Pee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9378722Abstract: A lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate. The lithographic apparatus includes an acoustical sensor to measure a first acoustic vibration in a sensor measurement area in the lithographic apparatus. An actuator is provided to generate a second acoustic vibration in at least an area of the lithographic apparatus. Further, a control device is provided having a sensor input to receive a sensor signal of the acoustical sensor and an actuator output to provide an actuator drive signal to the actuator. The control device is arranged to drive the actuator so as to let the second acoustic vibration at least partly compensate in the area the first acoustic vibration.Type: GrantFiled: December 10, 2008Date of Patent: June 28, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van der Wijst, Johan Hendrik Geerke, Peter Paul Hempenius, Youssef Karel Maria De Vos, Joost De Pee, Clementius Andreas Johannes Beijers, Nicolaas Bernardus Roozen, Erwin Antonius Henricus Fransiscus Van den Boogaert, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Patent number: 8743344Abstract: A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are presented.Type: GrantFiled: May 22, 2009Date of Patent: June 3, 2014Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Martinus Van Duijnhoven, Johan Hendrik Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon
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Patent number: 8553199Abstract: A vibration damping arrangement for a lithographic apparatus includes a sensor arranged to, in use, detect a vibration of a projection system. An actuator is arranged to, in use, exert a force on a control unit of the projection system to convert an output signal of the sensor to an actuator input signal such that, during operation, the vibration of the projection system is mitigated by controlling the actuator by the input signal to exert the force to the projection system.Type: GrantFiled: November 11, 2008Date of Patent: October 8, 2013Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Hendrik Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Patent number: 8245824Abstract: An active damping system to dampen a vibration of at least a part of the structure, including a device to determine a position quantity of the structure and an actuator to exert a force on the structure in dependency of the determined position quantity, wherein the device is a calculation device configured to calculate the position quantity of the structure on the basis of actuator signals.Type: GrantFiled: November 10, 2008Date of Patent: August 21, 2012Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Patent number: 8243258Abstract: A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system.Type: GrantFiled: November 21, 2008Date of Patent: August 14, 2012Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Hendrik Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Patent number: 8164737Abstract: A lithographic apparatus includes a projection system to project a patterned radiation beam onto a substrate, and a damping system to dampen a vibration of at least part of the projection system, the damping system including an interface damping mass and an active damping subsystem to dampen a vibration of at least part of the interface damping mass, the interface damping mass connected to the projection system, and the active damping subsystem connected to the interface damping mass, the active damping subsystem including a sensor to measure a position quantity of the interface damping mass and an actuator to exert a force on the interface damping mass based on a signal provided by the sensor. The damping system further includes an interface damping device connected to the interface damping mass and configured to damp a movement of the interface damping mass at an eigenfrequency of the interface damping mass.Type: GrantFiled: October 10, 2008Date of Patent: April 24, 2012Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Patent number: 8059259Abstract: An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.Type: GrantFiled: November 11, 2008Date of Patent: November 15, 2011Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Publication number: 20100020525Abstract: A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are presented.Type: ApplicationFiled: May 22, 2009Publication date: January 28, 2010Applicant: ASML Netherlands B.V.Inventors: Hans BUTLER, Martinus Van Duijnhoven, Johan Hendrik Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon
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Publication number: 20090207393Abstract: An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.Type: ApplicationFiled: November 11, 2008Publication date: August 20, 2009Applicant: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Publication number: 20090195763Abstract: A lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate. The lithographic apparatus includes an acoustical sensor to measure a first acoustic vibration in a sensor measurement area in the lithographic apparatus. An actuator is provided to generate a second acoustic vibration in at least an area of the lithographic apparatus. Further, a control device is provided having a sensor input to receive a sensor signal of the acoustical sensor and an actuator output to provide an actuator drive signal to the actuator. The control device is arranged to drive the actuator so as to let the second acoustic vibration at least partly compensate in the area the first acoustic vibration.Type: ApplicationFiled: December 10, 2008Publication date: August 6, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Hendrik Geerke, Peter Paul Hempenius, Youssef Karel Maria De Vos, Joost De Pee, Clementius Andreas Johannes Beijers, Nicolaas Bernardus Roozen, Erwin Antonius Henricus Fransiscus Van Den Boogaert, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Publication number: 20090180092Abstract: An active damping system to dampen a vibration of at least a part of the structure, including a device to determine a position quantity of the structure and an actuator to exert a force on the structure in dependency of the determined position quantity, wherein the device is a calculation device configured to calculate the position quantity of the structure on the basis of actuator signals.Type: ApplicationFiled: November 10, 2008Publication date: July 16, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Hans BUTLER, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Publication number: 20090161085Abstract: A lithographic apparatus may be provided with an acoustic resonator to dampen an acoustic vibration in the lithographic apparatus. The acoustic resonator may include a Helmholtz resonator. The helmholz resonator may be provided with an active element to provide active damping and/or altering a spring characteristic of the mass spring assembly formed by the resonator. The resonator may be provided at a slit in a shield between the patterning device stage and the projection system to suppress transfer of acoustical vibrations, caused by e.g. a movement of the patterning device stage, to the projection system.Type: ApplicationFiled: November 21, 2008Publication date: June 25, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Hendrik Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Publication number: 20090147230Abstract: A vibration damping arrangement for a lithographic apparatus includes a sensor arranged to, in use, detect a vibration of a projection system. An actuator is arranged to, in use, exert a force on a control unit of the projection system to convert an output signal of the sensor to an actuator input signal such that, during operation, the vibration of the projection system is mitigated by controlling the actuator by the input signal to exert the force to the projection system.Type: ApplicationFiled: November 11, 2008Publication date: June 11, 2009Applicant: ASML Netherlands B.V.Inventors: Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Hendrik Geerke, Joost De Pee, Clementius Andreas Johannes Beijers, Marco Hendrikus Hermanus Oude Nijhuis, Francois Xavier Debiesme
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Patent number: 7538273Abstract: A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length. One end of the cable bundle is fixed to the first object and another end of the bundle is fixed to the second object. A cable bundle holder configured to hold the cable bundle at a certain location along the length of the cable bundle, and a control system configured to control the position of the cable bundle holder with respect to the second object are presented. A control system for cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are also presented.Type: GrantFiled: August 8, 2006Date of Patent: May 26, 2009Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Martinus Van Duijnhoven, Johan Hendrik Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon
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Publication number: 20090122284Abstract: A lithographic apparatus includes a projection system to project a patterned radiation beam onto a substrate, and a damping system to dampen a vibration of at least part of the projection system, the damping system including an interface damping mass and an active damping subsystem to dampen a vibration of at least part of the interface damping mass, the interface damping mass connected to the projection system, and the active damping subsystem connected to the interface damping mass, the active damping subsystem including a sensor to measure a position quantity of the interface damping mass and an actuator to exert a force on the interface damping mass based on a signal provided by the sensor. The damping system further includes an interface damping device connected to the interface damping mass and configured to damp a movement of the interface damping mass at an eigenfrequency of the interface damping mass.Type: ApplicationFiled: October 10, 2008Publication date: May 14, 2009Applicant: ASML NETHERLANDS B.V.Inventors: Hans Butler, Erik Roelof Loopstra, Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker
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Publication number: 20080035372Abstract: A cable connection between a first object and a second object includes a cable bundle of one or more cables having a certain length, one end of the bundle fixed to the first object and another end of the bundle fixed to the second object, a cable bundle holder configured to hold the bundle at a location along the length of the bundle, and a control system configured to control a position of the cable bundle holder with respect to the second object. A control system for a cable connection, and a method of reducing the transfer of vibrations from a first object to a second object via a cable connection are also presented.Type: ApplicationFiled: August 8, 2006Publication date: February 14, 2008Applicant: ASML Netherlands B.V.Inventors: Hans Butler, Martinus Van Duijnhoven, Johan Hendrik Geerke, Joost De Pee, Cornelius Adrianus Lambertus De Hoon
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Patent number: 7170582Abstract: To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.Type: GrantFiled: December 13, 2004Date of Patent: January 30, 2007Assignee: ASML Netherlands B.V.Inventors: Hans Butler, Frank Auer, Martinus Van Duijnhoven, Pieter Johannes Gertrudis Meijers, Jan-Gerard Cornelis Van Der Toorn, Joost De Pee
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Publication number: 20060126040Abstract: To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.Type: ApplicationFiled: December 13, 2004Publication date: June 15, 2006Applicant: ASML NETHERLANDS B.V.Inventors: Hans Butler, Frank Auer, Martinus Duijnhoven, Pieter Gertrudis Meijers, Jan-Gerard Van Der Toorn, Joost De Pee