Patents by Inventor Joost VAN BREE

Joost VAN BREE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEM IMAGE ALIGNMENT
    Publication number: 20240257367
    Abstract: A method of determining offsets between a plurality of data sets, each data set representing a sampling area of a pattern formed on a sample, wherein each sampling area derives from a predetermined portion of a mask pattern, the method comprising: detecting a fingerprint of the mask pattern in noise of the data sets; and determining offsets based on the fingerprint of the mask pattern.
    Type: Application
    Filed: April 9, 2024
    Publication date: August 1, 2024
    Applicant: ASML Netherlands B.V.
    Inventors: Marleen KOOIMAN, Joost VAN BREE