Patents by Inventor Joost van Groen

Joost van Groen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for sensing wafers located inside a closed wafer cassette
    Patent number: 7202491
    Abstract: Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
    Type: Grant
    Filed: January 30, 2006
    Date of Patent: April 10, 2007
    Assignee: ASM International N.V.
    Inventors: Adriaan Garssen, Joost van Groen, Christianus Gerardus Maria de Ridder
  • Method and apparatus for mapping of wafers located inside a closed wafer cassette
    Patent number: 7015492
    Abstract: Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: March 21, 2006
    Assignee: ASM International N.V.
    Inventors: Adriaan Garssen, Joost van Groen, Christianus Gerardus Maria de Ridder
  • Method and apparatus for mapping of wafers located inside a closed wafer cassette
    Publication number: 20050035313
    Abstract: Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
    Type: Application
    Filed: August 15, 2003
    Publication date: February 17, 2005
    Inventors: Adriaan Garssen, Joost Van Groen, Christianus Gerardus De Ridder