Abstract: A micro light emitting diode including a mesa comprising an epitaxial structure and having a top surface with an area less than 10 micrometers by 10 micrometers, less than 1 micrometer by 1 micrometer, or less than 0.5 micrometers by 0.5 micrometers; a dielectric on the top surface; and a via hole in the dielectric that is centered or self aligned on the top surface, e.g., perfectly centered or centered within 0.5% of the center of the top surface. In one or more examples, the micro light emitting diode is plasma damage free. Metallization in the via hole is used to electrically contact the micro light emitting diode.

Abstract: In one embodiment employing a vertical draw apparatus, a method of crystallization growth on a substrate surface of a substrate having a substrate material includes: mounting the substrate to a sample holder with the substrate surface facing a liquid surface of a reservoir disposed in a chamber that provides an ambient temperature; seeding the substrate surface with seed droplets; lowering the substrate surface to the liquid surface of the reservoir; independently controlling a temperature of the substrate and a temperature of the reservoir to produce a temperature difference between the substrate and the reservoir over a period of time for crystallization growth; and retracting the substrate surface from the liquid surface of the reservoir at a draw rate. The draw rate and the temperature difference are selected to grow polycrystalline laminate on the substrate surface. Consistent polycrystalline columnar microstructures are formed with appropriate seeding of the substrate surface.