Abstract: In an optical position measuring device for detecting the relative position of a first measuring standard and a second measuring standard, movable relative to each other along at least one measuring direction, at a splitting grating, a beam bundle emitted by a light source is split up into at least two partial beam bundles. When passing through scanning beam paths, the partial beam bundles undergo different polarization-optical effects. After the differently polarized partial beam bundles are recombined at a combination grating, a plurality of phase-displaced, displacement-dependent scanning signals is able to be generated from the resulting beam bundle. No polarization-optical components are arranged in the scanning beam paths of the partial beam bundles between the splitting and recombination.

Abstract: An optical position-measuring device includes a measuring standard as well as a scanning unit movable relative to it along at least one measuring direction, a scanning beam path being formed between the measuring standard and scanning unit and being used to generate displacement-dependent signals. A protective cap is disposed in a manner allowing movement along an axis perpendicular to the measuring-standard plane such that in at least one operating mode, the protective cap for the most part surrounds the scanning beam path between the scanning unit and measuring standard.

Abstract: A position-measuring device for detecting the position of two objects movable relative to each other, includes a measuring standard that is joined to one of the two objects, as well as a scanning system for scanning the measuring standard, the scanning system being joined to the other of the two objects. The scanning system permits a simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects. To that end, on the part of the scanning system, two scanning beam paths are formed, in which a group of phase-shifted signals is able to be generated in each case at the output end from interfering partial beams of rays. In addition, via the scanning system, at least a third scanning beam path is formed, by which it is possible to determine position along a second lateral shift direction of the objects.

Abstract: A system for positioning a tool relative to a workpiece includes a movable table for accommodating a workpiece, and executing movements in two main moving directions during processing of the workpiece, one or more planar measuring standards provided in stationary fashion about the tool and extend in the plane of the main moving directions, and scanning heads, mounted in at least three corners of the table, for detecting the position of the table relative to the measuring standards. The position of the table is determinable by the scanning heads in six degrees of freedom. In at least one of the corners, one or more scanning heads having a total of at least three measuring axes is/are provided for 3-D position detection in three independent spatial directions. Sensitivity vectors of the measuring axes for the 3-D position detection are neither parallel to the X-Z plane nor parallel to the Y-Z plane.

Abstract: In an optical position measuring device for detecting the relative position of a first measuring standard and a second measuring standard, movable relative to each other along at least one measuring direction, at a splitting grating, a beam bundle emitted by a light source is split up into at least two partial beam bundles. When passing through scanning beam paths, the partial beam bundles undergo different polarization-optical effects. After the differently polarized partial beam bundles are recombined at a combination grating, a plurality of phase-displaced, displacement-dependent scanning signals is able to be generated from the resulting beam bundle. No polarization-optical components are arranged in the scanning beam paths of the partial beam bundles between the splitting and recombination.

Abstract: An interferometer includes a light source, beam splitter, measuring reflector, reference retroreflector, detector system, and two transparent plane plates. The beam splitter splits a first beam of rays, emitted by the light source, into at least one measuring beam and at least one reference beam, defining a first splitting plane. The measuring beam propagates in a measuring arm and the reference beam propagates in a reference arm until being recombined at a recombining location, which is oriented parallel to the first splitting plane. The measuring reflector is disposed in the measuring arm, and the reference retroreflector is disposed in the reference arm. The first and second transparent plane plates are disposed parallel to each other in the beam path between the light source and the detector system. The reference retroreflector is formed in the first plane plate and the beam splitter is disposed on the second plane plate.

Abstract: A system for positioning a tool relative to a workpiece includes a movable table for accommodating a workpiece, the table executing movements in two main moving directions during the processing of the workpiece, one or more planar measuring standards provided in stationary fashion about the tool and extend in the plane of the main moving directions, and scanning heads, mounted in at least three corners of the table, for detecting the position of the table relative to the measuring standards. The position of the table is determinable by the scanning heads in six degrees of freedom. In at least one of the corners, one or more scanning heads having a total of at least three measuring axes is/are provided for 3-D position detection in three independent spatial directions. The sensitivity vectors of the measuring axes for the 3-D position detection are neither parallel to the X-Z plane nor parallel to the Y-Z plane.

Abstract: A position-measuring device for detecting the position of two objects movable relative to each other, includes a measuring standard that is joined to one of the two objects, as well as a scanning system for scanning the measuring standard, the scanning system being joined to the other of the two objects. The scanning system permits a simultaneous determination of position along a first lateral shift direction and along a vertical shift direction of the objects. To that end, on the part of the scanning system, two scanning beam paths are formed, in which a group of phase-shifted signals is able to be generated in each case at the output end from interfering partial beams of rays. In addition, via the scanning system, at least a third scanning beam path is formed, by which it is possible to determine position along a second lateral shift direction of the objects.

Abstract: An optical position-measuring device includes a measuring standard as well as a scanning unit movable relative to it along at least one measuring direction, a scanning beam path being formed between the measuring standard and scanning unit and being used to generate displacement-dependent signals. A protective cap is disposed in a manner allowing movement along an axis perpendicular to the measuring-standard plane such that in at least one operating mode, the protective cap for the most part surrounds the scanning beam path between the scanning unit and measuring standard.

Abstract: An interferometer includes a light source, a beam splitter, a measuring reflector, a reference retroreflector, a detector system, and two transparent plane plates. The beam splitter splits a first beam of rays, emitted by the light source, into at least one measuring beam and at least one reference beam, via which a first splitting plane is defined. The measuring beam propagates in a measuring arm and the reference beam propagates in a reference arm until being recombined at a recombining location in a first recombining plane. The first recombining plane is oriented parallel to the first splitting plane. The measuring reflector, on which the measuring beam falls perpendicularly at least twice, is disposed in the measuring arm and is joined to an object to be measured that is movable along a measuring direction. The reference retroreflector, on which the reference beam falls at least once, is disposed in the reference arm.

Abstract: A method for position determination that includes generating first and second position-dependent scanning signals, transmitting the first and second position-dependent scanning signals from a scanning location via corresponding first and second scanning channels to corresponding first and second storage elements, storing corresponding first and second instantaneous values present at the first and second storage elements at corresponding first and second storage times. Forming a measured position value from the first stored instantaneous value and the second stored instantaneous value. A difference exists between corresponding first and second transit times of the first and second position-dependent scanning signals in the corresponding first and second scanning channels, the difference is compensated by individually delaying the first and second position-dependent scanning signals, so that the stored first and second instantaneous values have appeared at a common time at the scanning location.

Abstract: A position measuring system that includes a scale and a scanning device that scans the scale. A light source, which emits a light pulse upon receipt of a request signal and an optical fiber that transmits the light pulse from the light source to the scanning device and for illuminating the scale. At least one photo detector that detects the light pulse affected by the scale as a function of its position.

Abstract: A method for position determination in a position measuring device that includes digitizing analog position data from a detector unit within time intervals of an internal clock rate and calculating position data from the digitized data. Determining a period of time ?t between a pulse of the internal clock until an appearance of an external trigger signal and a processing of at least two position data, together with the period of time ?t.

Abstract: A position measuring system that includes a scale and a scanning device that scans the scale. A light source, which emits a light pulse upon receipt of a request signal and an optical fiber that transmits the light pulse from the light source to the scanning device and for illuminating the scale. At least one photo detector that detects the light pulse affected by the scale as a function of its position.

Abstract: A method for position determination in a position measuring device that includes digitizing analog position data from a detector unit within time intervals of an internal clock rate and calculating position data from the digitized data. Determining a period of time &Dgr;t between a pulse of said internal clock until an appearance of an external trigger signal and a processing of at least two position data, together with the period of time &Dgr;t.