Patents by Inventor Joris Dominicus Bastiaan Johannes Van den Boom

Joris Dominicus Bastiaan Johannes Van den Boom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10877384
    Abstract: An apparatus comprising a heat-sensitive device (F); a radiative element (RE), the radiative element in operation generating first electromagnetic radiation (ER), the first radiation propagating towards the heat-sensitive device; and a radiation-shielding device (20) arranged between the radiative element and the heat-sensitive device such that, in operation, the first radiation impinges on the radiation-shielding device. The radiation-shielding device comprises a first shield element (21) having a first fluid channel (215) arranged therein, the first shield element having a first surface (213) and a second surface (214), the first surface being arranged closer to the radiative element than the second surface; and a second shield element (22) having a second fluid channel (225) arranged therein, the second shield element having a third surface (223) and a fourth surface (224), the third surface being arranged closer to the radiative element than the fourth surface.
    Type: Grant
    Filed: February 21, 2019
    Date of Patent: December 29, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Johannes Joseph Janssen, Philippe Jacqueline Johannes Hubertus Anthonius Habets, Güneş Nakiboğlu, Roger Wilhelmus Antonius Henricus Schmitz, Remco Van de Meerendonk, Joris Dominicus Bastiaan Johannes Van den Boom, Nicholas Peter Waterson
  • Publication number: 20200401058
    Abstract: An apparatus comprising a heat-sensitive device (F); a radiative element (RE), the radiative element in operation generating first electromagnetic radiation (ER), the first radiation propagating towards the heat-sensitive device; and a radiation-shielding device (20) arranged between the radiative element and the heat-sensitive device such that, in operation, the first radiation impinges on the radiation-shielding device. The radiation-shielding device comprises a first shield element (21) having a first fluid channel (215) arranged therein, the first shield element having a first surface (213) and a second surface (214), the first surface being arranged closer to the radiative element than the second surface; and a second shield element (22) having a second fluid channel (225) arranged therein, the second shield element having a third surface (223) and a fourth surface (224), the third surface being arranged closer to the radiative element than the fourth surface.
    Type: Application
    Filed: February 21, 2019
    Publication date: December 24, 2020
    Inventors: Franciscus Johannes Joseph Janssen, Philippe Jacqueline Johannes Hubertus Anthonius Habets, Günes Nakiboglu, Roger Wilhelmus Antonius Henricus Schmitz, Remco Van de Meerendonk, Joris Dominicus Bastiaan Johannes Van den Boom, Nicholas Peter Waterson