Abstract: A plate to be positioned between a movable stage and a projection system of a lithographic apparatus, the plate having a surface to face the movable stage; an opening through the plate for passage of patterned radiation beam; one or more gas outlets in a side of the opening and in the surface of the plate, wherein the one or more gas outlets are configured to supply gas to a region between the movable stage and the projection system, wherein all of the one or more gas outlets in the surface of the plate are positioned such that, for each of such one or more gas outlets, a line that is both orthogonal to the surface and intersects the gas outlet does not intersect the patterning device at any point during the entire range of movement of the patterning device.

Abstract: The present utility model application refers to a new constructive arrangement introduced in acoustic filter of hermetic compressor, and more particularly, a new constructive arrangement that optimizes the suction flow of the acoustic filter, which is normally arranged within the hermetic housing of the hermetic compressor. The suction acoustic filter (1) is composed by at least one outlet pipe (2), outlet pipe (2) comprising at least two independent suction outlets (21). Each independent suction outlet (21) extending along outlet pipe (2).

Abstract: The present utility model application refers to a new constructive arrangement introduced in acoustic filter of hermetic compressor, and more particularly, a new constructive arrangement that optimizes the suction flow of the acoustic filter, which is normally arranged within the hermetic housing of the hermetic compressor. The suction acoustic filter (1) is composed by at least one outlet pipe (2), outlet pipe (2) comprising at least two independent suction outlets (21). Each independent suction outlet (21) extending along outlet pipe (2).