Patents by Inventor Jose Omar Rodriquez

Jose Omar Rodriquez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for conditioning a polishing pad
    Patent number: 6896583
    Abstract: A method (60) for conditioning a polishing pad (20) used for polishing semiconductor wafers (14). The degradation in conditioning performance of a conditioning device (28) is accounted for by controlling at least one of the conditioning velocity (64), conditioning down force (66) and conditioning time (68). The amount of the degradation of conditioning performance during consecutive uses of a conditioning device (28) may be determined by measuring the friction force (72) between the conditioning device (28) and the polishing pad (20), or it may be predicted on the basis of an algorithm (82) developed from data obtained from a plurality of representative conditioning devices (80).
    Type: Grant
    Filed: February 6, 2001
    Date of Patent: May 24, 2005
    Assignee: Agere Systems, Inc.
    Inventors: Jose Omar Rodriquez, Laurence Darnell Schultz, Charles A. Storey
  • Method and apparatus for conditioning a polishing pad
    Publication number: 20020106971
    Abstract: A method (60) for conditioning a polishing pad (20) used for polishing semiconductor wafers (14). The degradation in conditioning performance of a conditioning device (28) is accounted for by controlling at least one of the conditioning velocity (64), conditioning down force (66) and conditioning time (68). The amount of the degradation of conditioning performance during consecutive uses of a conditioning device (28) may be determined by measuring the friction force (72) between the conditioning device (28) and the polishing pad (20), or it may be predicted on the basis of an algorithm (82) developed from data obtained from a plurality of representative conditioning devices (80).
    Type: Application
    Filed: February 6, 2001
    Publication date: August 8, 2002
    Inventors: Jose Omar Rodriquez, Laurence Darnell Schultz, Charles A. Storey