Patents by Inventor Josef Biberger

Josef Biberger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240038481
    Abstract: Imaging, processing and/or analyzing an object using a particle beam device includes guiding a first particle beam over the object, processing the object using the first particle beam or detecting first interaction particles and/or a first interaction radiation, where the first interaction particles and/or the first interaction radiation results/result from an interaction of the first particle beam with the object, controlling a second deflection device for guiding the second particle beam over the object even while the first particle beam is being guided over the object, and deflecting the first particle beam from the object. Only when the first particle beam has been deflected, the object is processed using the second particle beam or detecting second interaction particles and/or a second interaction radiation that results/result from an interaction of the second particle beam with the object.
    Type: Application
    Filed: June 1, 2023
    Publication date: February 1, 2024
    Applicant: Carl Zeiss Microscopy GmbH
    Inventor: Josef Biberger
  • Publication number: 20230343546
    Abstract: The disclosure relates to a receptacle device for receiving and preparing a microscopic sample. The receptacle device is mountable onto a sample stage. The sample stage is arranged in a sample chamber of a microscope system and is movable by way of an open kinematic chain of rotational or rotational and translational elements. The last rotational element of the open kinematic chain is arranged such that it is rotatable about an axis R1. The receptacle device has an axis R2, about which the receptacle device is arranged such that it is rotatable. The axis R2 is arranged at an angle ? relative to the axis R1. The angle ? assumes a value in the range of 10° to 80°. By rotation of the receptacle device about the axis R2, the receptacle device can adopt at least a first position and a second position.
    Type: Application
    Filed: April 20, 2023
    Publication date: October 26, 2023
    Inventors: Michele Nicoletti, Josef Biberger
  • Publication number: 20220375714
    Abstract: A method for positioning a movable object in a sample chamber of a particle beam microscope is carried out with the aid of a flexible particle beam barrier. The particle beam microscope comprises at least one particle beam column for producing a beam of charged particles, and a sample chamber, a detector for detecting interaction signals and a control and evaluation unit. In the method, initially an object is provided in the sample chamber. Next, a barrier region is defined, which is subsequently scanned with the beam of charged particles. The interaction signals produced during the scan are detected. The object is moved towards the barrier region, wherein the detected interaction signals are monitored and signal changes are registered, with the result that it is possible to detect when the object moves into the barrier region or leaves the barrier region.
    Type: Application
    Filed: April 11, 2022
    Publication date: November 24, 2022
    Inventors: Josef Biberger, Michal Postolski, Miriam Tabea Kaefer, Holger Ehm
  • Patent number: 11504798
    Abstract: A method of raster scanning a surface of an object using a particle beam comprises determining a basic set of raster points within a surface; determining a surface portion of the surface of the object, wherein the surface portion is to be raster scanned; ordering a set of raster points of the basic set located within the surface portion; and scanning of the surface portion by directing the particle beam onto the raster points of the ordered set in an order corresponding to an order of the raster points in the ordered set from the outside to the inside, i.e. starting from the boundary of the surface portion towards its center, or in the reverse order, i.e. from the inside to the outside.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: November 22, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Josef Biberger, Ralph Pulwey
  • Patent number: 11501948
    Abstract: A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: November 15, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Luyang Han, Martin Edelmann, Josef Biberger
  • Patent number: 11474004
    Abstract: A microtome includes: a base element; a mid element movably connected to the base element via a joint; a first cutting apparatus element; a second cutting apparatus element; a first actuator apparatus configured to move the first cutting apparatus element relative to the mid element in a delivery direction in order thereby to set a delivery of the object to the blade; a measuring apparatus configured to measure a position of the mid element or of the first cutting apparatus element in the delivery direction relative to a reference; and a controller configured to control the first actuator apparatus on the basis of the position measured by the measuring apparatus. This can compensate the effect of the mechanical play of the joint on the first cutting apparatus element.
    Type: Grant
    Filed: July 16, 2020
    Date of Patent: October 18, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Josef Biberger, Judith Kimling
  • Patent number: 11215536
    Abstract: Methods and apparatuses for capturing volume information of microscopic samples include a microscope system having at least one particle beam column, by which a beam of focused, charged particles can be generated, and an in-situ microtome, i.e., a microtome integrated in the microscope system. The method cam include a) providing a sample including a volume of interest (VOI); b) setting a cut surface lying within the sample; c) defining the set cut surface as processing surface; d) exposing the cut surface by virtue of ablating sample material by cutting with the in-situ microtome; and e) processing the sample with the particle beam, wherein the start point of the processing is disposed on the exposed processing surface.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: January 4, 2022
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Marlene Thaler, Robert Kirmse, Josef Biberger, Judith Kimling, Lars Ehrhardt
  • Patent number: 11152187
    Abstract: A method for positioning a specimen in a microscope system includes overserving and/or processing a region of interest (ROI) on the specimen. The microscope system includes: an optical axis; a movable specimen stage for receiving a specimen; a memory apparatus for storing data records that describe the positions of the specimen; and a control apparatus, which can control the movement of the specimen stage with the aid of the stored data records. The method includes: holding a specimen region (ROI) in the first position; storing a first data record, by which the first position is described, wherein the first position is defined as independent position; storing a second data record, by which the second position is described, wherein the second position is linked to the independent position; and calling one of the stored data records such that the specimen stage is moved in such a way that the specimen region is held at the position that is described by the called data record.
    Type: Grant
    Filed: May 13, 2019
    Date of Patent: October 19, 2021
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Josef Biberger
  • Patent number: 11087957
    Abstract: A method of operating a particle beam microscope includes repeating a sequence to move a particle beam across a surface of an object. The surface of the object has a region defined by a closed boundary line. The sequence includes moving the particle beam from an entry location of the present sequence to an exit location of the present sequence along a scan path. The entry location of the present sequence and the exit location of the present sequence are located on the boundary line. The scan path is located entirely inside the region of the surface of the object. The sequence also includes moving the particle beam from the exit location of the present sequence to an entry location of the next sequence along a return path. The entry location of the next sequence is located on the boundary line. The return path is located entirely outside the region of the surface of the object.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: August 10, 2021
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss Microscopy GmbH
    Inventors: Daniel Fischer, Josef Biberger, Pedro Besteiro
  • Publication number: 20210018403
    Abstract: Methods and apparatuses for capturing volume information of microscopic samples include a microscope system having at least one particle beam column, by which a beam of focused, charged particles can be generated, and an in-situ microtome, i.e., a microtome integrated in the microscope system. The method cam include a) providing a sample including a volume of interest (VOI); b) setting a cut surface lying within the sample; c) defining the set cut surface as processing surface; d) exposing the cut surface by virtue of ablating sample material by cutting with the in-situ microtome; and e) processing the sample with the particle beam, wherein the start point of the processing is disposed on the exposed processing surface.
    Type: Application
    Filed: July 7, 2020
    Publication date: January 21, 2021
    Inventors: Marlene Thaler, Robert Kirmse, Josef Biberger, Judith Kimling, Lars Ehrhardt
  • Publication number: 20210018405
    Abstract: A microtome includes: a base element; a mid element movably connected to the base element via a joint; a first cutting apparatus element; a second cutting apparatus element; a first actuator apparatus configured to move the first cutting apparatus element relative to the mid element in a delivery direction in order thereby to set a delivery of the object to the blade; a measuring apparatus configured to measure a position of the mid element or of the first cutting apparatus element in the delivery direction relative to a reference; and a controller configured to control the first actuator apparatus on the basis of the position measured by the measuring apparatus. This can compensate the effect of the mechanical play of the joint on the first cutting apparatus element.
    Type: Application
    Filed: July 16, 2020
    Publication date: January 21, 2021
    Inventors: Josef Biberger, Judith Kimling
  • Publication number: 20200395190
    Abstract: A method of operating a particle beam device for imaging, analyzing and/or processing an object may be carried out, for example, by a particle beam device. The method may include: identifying at least one region of interest on the object; defining: (i) an analyzing sequence for analyzing the object, (ii) a processing sequence for processing the object by deformation and (iii) an adapting sequence for adapting the at least one region of interest depending on the processing sequence and/or on the analyzing sequence; processing the object by deformation according to the processing sequence and/or analyzing the object according to the analyzing sequence; adapting the at least one region of interest according to the adapting sequence; and after or while adapting the at least one region of interest, imaging and/or analyzing the at least one region of interest using a primary particle beam being generated by a particle beam generator.
    Type: Application
    Filed: June 5, 2020
    Publication date: December 17, 2020
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Luyang Han, Martin Edelmann, Josef Biberger
  • Publication number: 20200333271
    Abstract: The invention described herein relates to a method for controlling a unit of a particle beam device for imaging, analyzing and/or processing an object. Moreover, the invention described herein relates to a particle beam device for carrying out the method.
    Type: Application
    Filed: May 5, 2020
    Publication date: October 22, 2020
    Applicant: Carl Zeiss Microscopy GmbH
    Inventors: Christian Hendrich, Martin Kienle, Josef Biberger, Michal Postolski
  • Publication number: 20200311886
    Abstract: A method for determining and correcting an image recording aberration of an image recording device includes recording a first image using an image recording device. The first image represents a first region of an object. The method also includes recording second images using the image recording device. The second images represent mutually different partial regions of the first region. Each partial region is smaller than the first region. The method further includes determining at least one value of an image recording aberration of the image recording device on the basis of the first image and the second images. Related devices are disclosed.
    Type: Application
    Filed: March 27, 2020
    Publication date: October 1, 2020
    Inventors: Josef Biberger, Simon Diemer
  • Patent number: 10741360
    Abstract: In a method for producing a TEM sample, an object is fastened to an element of an object holder such that a surface to be processed of the object is arranged substantially perpendicularly to an axis of rotation of the element. An ion beam is directed at the surface to be processed at grazing incidence, wherein the element adopts different rotational positions in relation to the axis of rotation, while the ion beam is directed at the surface to be processed.
    Type: Grant
    Filed: April 12, 2019
    Date of Patent: August 11, 2020
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Josef Biberger, Stefan Lengweiler
  • Publication number: 20200234913
    Abstract: A method of operating a particle beam microscope includes repeating a sequence to move a particle beam across a surface of an object. The surface of the object has a region defined by a closed boundary line. The sequence includes moving the particle beam from an entry location of the present sequence to an exit location of the present sequence along a scan path. The entry location of the present sequence and the exit location of the present sequence are located on the boundary line. The scan path is located entirely inside the region of the surface of the object. The sequence also includes moving the particle beam from the exit location of the present sequence to an entry location of the next sequence along a return path. The entry location of the next sequence is located on the boundary line. The return path is located entirely outside the region of the surface of the object.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 23, 2020
    Inventors: Daniel Fischer, Josef Biberger, Pedro Besteiro
  • Patent number: 10658152
    Abstract: A method for controlling a particle beam device for imaging, analyzing and/or processing an object, and a particle beam device for carrying out the method. The particle beam device may be an electron beam device and/or or an ion beam device. The method may include identifying at least one control parameter of a unit of the particle beam device using an eye tracker by tracking at least one eye of a user of the particle beam device, and changing the at least one control parameter of the unit of the particle beam device.
    Type: Grant
    Filed: October 4, 2018
    Date of Patent: May 19, 2020
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Christian Hendrich, Josef Biberger
  • Patent number: 10615002
    Abstract: Processes may be performed with a plurality of FIB-SEM systems. A first process group includes recording an image with the electron beam column, depositing material with supply of a process gas, and performing ion beam etching. A second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying an image that was recorded with the electron beam column. The processes of the second group are prioritized. The FIB-SEM systems are actuated to work through processes contained in process lists. If in a plurality of FIB-SEM systems processes of the second group are to be performed simultaneously, an instruction based on the prioritization is output to the user.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: April 7, 2020
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Josef Biberger, Ralph Pulwey
  • Publication number: 20200035444
    Abstract: The disclosure relates to a receptacle device for receiving and preparing a microscopic sample. The receptacle device is mountable onto a sample stage. The sample stage is arranged in a sample chamber of a microscope system and is movable by way of an open kinematic chain of rotational or rotational and translational elements. The last rotational element of the open kinematic chain is arranged such that it is rotatable about an axis R1. The receptacle device has an axis R2, about which the receptacle device is arranged such that it is rotatable. The axis R2 is arranged at an angle ? relative to the axis R1. The angle ? assumes a value in the range of 10° to 80°. By rotation of the receptacle device about the axis R2, the receptacle device can adopt at least a first position and a second position.
    Type: Application
    Filed: July 1, 2019
    Publication date: January 30, 2020
    Inventors: Michele Nicoletti, Josef Biberger
  • Publication number: 20200027696
    Abstract: Processes may be performed with a plurality of FIB-SEM systems. A first process group includes recording an image with the electron beam column, depositing material with supply of a process gas, and performing ion beam etching. A second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying an image that was recorded with the electron beam column. The processes of the second group are prioritized. The FIB-SEM systems are actuated to work through processes contained in process lists. If in a plurality of FIB-SEM systems processes of the second group are to be performed simultaneously, an instruction based on the prioritization is output to the user.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 23, 2020
    Inventors: Josef Biberger, Ralph Pulwey