Abstract: A linear motion machine includes a base having an upper surface configured to support one or more work pieces and an instrument movably mounted to the base via a plurality of guideways permitting movement of the instrument relative to the base along three axes. At least one of the pluralities of guideways includes an elongated guideway member made of a plurality of elongated generally planar web members. Each of the elongated generally planar web members has a length and a pair of opposite side edges running along the length. The plurality of elongated generally planar web members are bonded together at least at one or more of the side edges to form the elongated guideway member. The elongated guideway member includes a ceramic material.

Abstract: A linear motion machine includes a base having an upper surface configured to support one or more work pieces and an instrument movably mounted to the base via a plurality of guideways permitting movement of the instrument relative to the base along three axes. At least one of the pluralities of guideways includes an elongated guideway member made of a plurality of elongated generally planar web members. Each of the elongated generally planar web members has a length and a pair of opposite side edges running along the length. The plurality of elongated generally planar web members are bonded together at least at one or more of the side edges to form the elongated guideway member. The elongated guideway member includes a ceramic material.