Patents by Inventor Josef Steinkeller

Josef Steinkeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VACUUM TREATMENT APPARATUS
    Publication number: 20230234094
    Abstract: So as to perform a vacuum surface treatment on a workpiece at a predetermined temperature, which is different from a temperature to which the surface is exposed during the vacuum surface treatment, the workpiece is conveyed in a conveyance direction along one or more than one station group including one or more than one tempering station and of a single treatment station.
    Type: Application
    Filed: May 19, 2021
    Publication date: July 27, 2023
    Inventors: Rico BENZ, Martin DÜTSCHLER, Josef STEINKELLER, Daniele ZORZI, Jörg PATSCHEIDER, Stephan VOSER, Pierre MATTEACCI
  • Method and apparatus for control of layer thicknesses
    Publication number: 20070105400
    Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.
    Type: Application
    Filed: November 8, 2005
    Publication date: May 10, 2007
    Applicant: Unaxis Balzers AG
    Inventors: Bernd Heinz, Cem Yavaser, Thomas Pfaff, Josef Steinkeller