Patents by Inventor Josef Steinkeller

Josef Steinkeller has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for control of layer thicknesses
    Publication number: 20070105400
    Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.
    Type: Application
    Filed: November 8, 2005
    Publication date: May 10, 2007
    Applicant: Unaxis Balzers AG
    Inventors: Bernd Heinz, Cem Yavaser, Thomas Pfaff, Josef Steinkeller