Abstract: Gate stacks of an array of memory cells and a plurality of select transistors are formed above a carrier, the gate stacks being separated by spacers. An opening is formed between the spacers in an area that is provided for a source line. A sacrificial layer is applied to fill the opening and is subsequently patterned. Interspaces are filled with a planarizing layer of dielectric material. The residues of the sacrificial layer are removed and an electrically conductive material is applied to form a source line.

Abstract: A memory system includes a plurality of resistive memory cell fields including at least a first resistive memory cell field and a second resistive memory cell field, the first resistive memory cell field formed with a plurality of resistive memory cells storing data at a first data storage speed, the second resistive memory cell field formed with a plurality of resistive memory cells storing data at a second data storage speed lower than the first data storage speed, and a controller controlling data transfer between the plurality of resistive memory cell fields.

Abstract: A layer of electrically conductive material is applied above a carrier surface. Gate electrodes are formed above a first area of the carrier surface from the electrically conductive material. An implantation of a dopant that is provided for source/drain regions is performed in the first area. The implant is annealed, and an auxiliary layer of a dielectric material is applied to planarize the surface. The first area is covered with a mask, and a further implantation of a dopant provided for source/drain regions is performed in a second area of the carrier surface provided for a memory cell array. The implant is annealed, and the memory cells are formed in the second area. The semiconductor memory device may comprise a selectively deposited electrically conductive material on the gate electrodes of the periphery and on buried bitlines of the memory cell array.

Abstract: A memory cell arrangement includes a first memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells, a second memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells. A dielectric material is between and above the first memory cell string and the second memory cell string. A source/drain line groove is defined in the dielectric material. The source/drain line groove extends from a source/drain region of one transistor of the first memory cell string to a source/drain region of the second memory cell string. Electrically conductive filling material is disposed in the source/drain line groove. Dielectric filling material is disposed in the source/drain line groove between the source/drain regions.

Abstract: A memory array includes first, second, third and forth memory cell strings. Each of the first, second, third, and fourth memory cell strings includes a number of serially-coupled memory cells, including a first memory cell and a last memory cell. A first interconnect is coupled to a first bit line and to each of the first, second, third and fourth memory cell strings. The first interconnect includes first, second, third and fourth string input select gates. Each input select gate has a first terminal coupled to the first bit line, and a second terminal coupled to one of the respective first, second, third or fourth memory cell strings.

Abstract: A semiconductor device is fabricated by forming a trench in a semiconductor body. A region of dielectric material is formed within at least a lower portion of the trench. An upper portion of the semiconductor body is doped. A cutout is formed in the semiconductor material such that a vertical strip of semiconductor material remains along a sidewall of the dielectric material. A lower portion of the semiconductor body adjacent the sidewall of the dielectric material is doped. A gate dielectric layer is formed over the vertical strip of semiconductor material and a gate electrode is arranged in the cutout.

Abstract: The present invention relates to a reprogrammable non-volatile memory cell which comprises a selection transistor and a data storage element. The invention further relates to a method of fabricating such a memory cell, as well as to a memory cell array comprising a number of such memory cells.

Abstract: A trench (2) is fabricated in a silicon body (1). The walls (4) of the trench are provided with a nitrogen implantation (6). An oxide layer between the source/drain regions (5) and a word line applied on the top side grows to a greater thickness than a lower oxide layer of an ONO storage layer fabricated as gate dielectric at the trench wall. Instead of the nitrogen implantation into the trench walls, it is possible to fabricate a metal silicide layer on the top sides of the source/drain regions in order to accelerate the oxide growth there.

Abstract: A method of manufacturing at least one NAND-coupled semiconductor component is disclosed. A layer structure is formed on or above a semiconductor substrate. The layer structure is patterned to expose at least one region to be doped. The exposed region is doped and annealed. The patterned layer structure is at least partially removed. Replacing material is formed in the region in which the patterned layer structure has been removed, thereby forming the at least one NAND-coupled semiconductor component.

Abstract: A semiconductor memory element, which can be controlled via field effect, includes a semiconductor substrate of a first conduction type, a first doping region of a second conduction type provided in the semiconductor substrate, a second doping region of the second conduction type provided in the semiconductor substrate, a channel region located between the first and second doping regions, a multilayer gate dielectric which is arranged adjacent to the channel region and has a charge trapping memory layer, and a gate terminal provided above the gate dielectric. The charge trapping memory layer includes at least one sequence of adjacent layers, wherein the sequence of adjacent layers comprises an amorphous silicon carbide layer and an amorphous silicon nitride layer.

Abstract: A memory device includes active regions extending in a first direction, the active regions being formed in a semiconductor substrate. Transistors are formed in the active regions, including a first and a second source/drain region, a channel formed between the first and the second source/drain region, a gate electrode, and a charge storage layer stack disposed between the gate electrode and the channel, where adjacent active regions are isolated from each other by fin isolation grooves. Wordlines extend in a second direction, and each wordline is connected with a plurality of gate electrodes that are assigned to different active regions. The active regions are formed as ridges in the semiconductor substrate, with the word lines and the charge storing layer stack being disposed adjacent to at least two sides of each of the active regions. Each of the ridges has a top portion and a bottom portion, where the maximum width of the top portion is larger than the minimum width of the bottom portion.

Abstract: The semiconductor memory device has a substrate with a main surface, on which parallel trenches are arranged. A memory layer is disposed at the sidewalls of the trenches, and gate electrodes are disposed in the trenches. Buried bitlines are formed as doped regions between neighboring trenches. The buried bitlines abut the sidewalls of the trenches and comprise upper surfaces, which are arranged at a specified distance from the bottom of the trenches. Source/drain regions are formed by sections of the buried bitlines.

Abstract: Wordline stacks are arranged parallel at a distance from one another on a substrate surface. Bitlines are arranged transversely to the wordline stacks at a distance from one another. Source/drain regions are formed as doped regions in the vicinity of the wordline stacks. A resistive layer is disposed between a plurality of the source/drain regions and the bitlines and formed of a material having a resistance that is switched by an applied voltage. Source lines are arranged parallel to the wordline stacks so that they connect further pluralities of the source/drain regions.

Abstract: A memory device includes an array of memory cells that include a memory element having a non-reactive resistance whose magnitude is programmable to assume a high-resistance state or a low-resistance state. Sets of first and second lines provide access to the memory cells, wherein the memory element of each memory cell is coupled between one of the first lines and one of the second lines. A checking unit determines whether to invert data values to be stored in memory cells coupled to at least a section of respective ones of the first lines based on a number of memory cells that would be programmed in the high-resistance state or the low-resistance state as a result of the data values in order to reduce the number memory cells programmed in the low-resistance state and the resulting leakage current.

Abstract: A semiconductor memory device includes a channel region, a gate electrode adjacent the channel region, and a charge-trapping layer between the channel region and the gate electrode. A voltage is applied between the gate electrode and the channel region to cause a first current of a first kind of charge carriers from the channel region to move into the charge-trapping layer and to cause a second current of a second kind of charge carriers from the gate electrode to move into the charge-trapping layer, until the value of the second current is at least half the amount of the first current value.

Abstract: An array of charge-trapping multi-bit memory cells is arranged in a virtual-ground NAND architecture. The memory cells are erased by Fowler-Nordheim tunneling of electrons into the memory layers. The write operation is effected by hot hole injection. A write voltage is applied by a bitline to two NAND chains in series. The subsequent bitline on the side of the memory cell to be programmed is maintained on floating potential, whereas the bitline on the other side is set to an inhibit voltage, which is provided to inhibit a program disturb of an addressed memory cell which is not to be programmed. This virtual-ground NAND architecture of charge-trapping memory cells enables an increased storage density.

Abstract: A method of making a memory device and a memory device is described. In one embodiment, a method of manufacturing a memory device is described. The method includes providing a substrate having a tunneling layer deposited on a main surface and having a first conductive lines arranged on the tunneling layer running in a first direction. A layer of dielectric material is deposited on the first conductive lines. A control gate layer is deposited. The first conductive lines are patterned to produce gate stacks. Dielectric material is deposited in between the gate stacks. The gate stacks are partially removed to uncover floating gate electrodes in region of selection transistor lines to be prepared creating selection transistor line recesses running in the second direction. The selection transistor line recesses are filled with a conductive material to create the selection transistor lines.

Abstract: A periodic pattern of conductor tracks with broader interspaces is produced by the application of a totally periodic pattern and subsequent removal of individual conductor tracks. An alternative method comprises the formation of a completely periodic hardmask, from which individual parts are removed. The modified hardmask is then used to etch a periodic pattern of conductor tracks with intermediate broader spaces.

Abstract: Transistor bodies of semiconductor material located at a main surface of a semiconductor substrate between shallow trench isolations are provided with a rounded or curved upper surface. A floating gate electrode is arranged above said upper surface and electrically insulated from the semiconductor material by a tunnel dielectric having essentially the same tiny thickness throughout a primary tunnel area encompassing the area of curvature. The floating gate electrode may bridge the transistor body and is covered with a coupling dielectric provided for a control gate electrode, which forms part of a wordline.

Abstract: A method for fabricating stacked non-volatile memory cells and non-volatile memory cell arrays are disclosed. A semiconductor wafer is provided having a charge-trapping layer and a conductive layer deposited on the surface of the semiconductor wafer. Using a mask layer on top of the conductive layer, contact holes are formed into which a contact fill material is deposited. A further conductive layer is deposited on the surface of the semiconductor wafer and is patterned so as to form word lines. The contact fill material is connected to a contact plug using the contact holes with the contact fill material as a landing pad.