Patents by Inventor Joseph A. Levert

Joseph A. Levert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6869347
    Abstract: Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.
    Type: Grant
    Filed: March 5, 2004
    Date of Patent: March 22, 2005
    Assignee: Oluma, Inc.
    Inventors: Vilas Koinkar, Timothy C. Collins, Joannes M. Costa, Joseph A. Levert
  • Publication number: 20040171329
    Abstract: Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.
    Type: Application
    Filed: March 5, 2004
    Publication date: September 2, 2004
    Applicant: Oluma, Inc.
    Inventors: Vilas Koinkar, Timothy C. Collins, Joannes M. Costa, Joseph A. Levert
  • Patent number: 6771874
    Abstract: A method of placing a fiber on a substrate includes holding at least one fiber under tension, aligning the held fiber with a groove formed into a substrate, moving the substrate towards the fiber to place the fiber in the groove, fixing the position of the fiber under tension in the groove, and releasing the fiber.
    Type: Grant
    Filed: May 17, 2002
    Date of Patent: August 3, 2004
    Assignee: Otuma, Inc.
    Inventors: Joseph A. Levert, Michael Talmadge
  • Patent number: 6719608
    Abstract: Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: April 13, 2004
    Assignee: Oluma, Inc.
    Inventors: Vilas Koinkar, Timothy C. Collins, Joannes M. Costa, Joseph A. Levert
  • Patent number: 6630433
    Abstract: Chemical mechanical planarization or spin etch planarization of surfaces of copper, tantalum and tantalum nitride is accomplished by means of the chemical formulations of the present invention. The chemical formulations may optionally include abrasive particles and which may be chemically reactive or inert. Contact or non-contact CMP may be performed with the present chemical formulations. Substantially 1:1 removal rate selectivity for Cu and Ta/TaN is achieved.
    Type: Grant
    Filed: December 20, 2000
    Date of Patent: October 7, 2003
    Assignee: Honeywell International Inc.
    Inventors: Fan Zhang, Daniel L. Towery, Joseph A. Levert, Shyama P. Mukherjee
  • Publication number: 20030133691
    Abstract: A method of placing a fiber on a substrate includes holding at least one fiber under tension, aligning the held fiber with a groove formed into a substrate, moving the substrate towards the fiber to place the fiber in the groove, fixing the position of the fiber under tension in the groove, and releasing the fiber.
    Type: Application
    Filed: May 17, 2002
    Publication date: July 17, 2003
    Inventors: Joseph A. Levert, Michael Talmadge
  • Patent number: 6407006
    Abstract: An apparatus for planarizing or patterning a dielectric film on a substrate is provided. The apparatus includes a press for applying contact pressure to an operably connected compression tool. The compression tool has a working face that is planar or patterned. A controller for regulating the position, timing and force applied by the compression tool to the dielectric film is also provided. There is also provided a support, with an optional workpiece holder for supporting the substrate and dielectric film during contact with the compression tool. Methods of using the apparatus, as well as planarized and/or patterned dielectric films are also provided.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: June 18, 2002
    Assignee: Honeywell International, Inc.
    Inventors: Joseph A Levert, Daniel Lynne Towery, Denis Endisch
  • Publication number: 20020020833
    Abstract: Chemical mechanical planarization or spin etch planarization of surfaces of copper, tantalum and tantalum nitride is accomplished by means of the chemical formulations of the present invention. The chemical formulations may optionally include abrasive particles and which may be chemically reactive or inert. Contact or non-contact CMP may be performed with the present chemical formulations. Substantially 1:1 removal rate selectivity for Cu and Ta/TaN is achieved.
    Type: Application
    Filed: December 20, 2000
    Publication date: February 21, 2002
    Inventors: Fan Zhang, Daniel L. Towery, Joseph A. Levert, Shyama P. Mukherjee
  • Publication number: 20010054706
    Abstract: The present invention describes methods and chemical compositions for the spin etch planarization of surfaces, particularly copper and tantalum. An etching solution is brought into contact with the upper face of a spinning wafer through a nozzle, preferably an oscillating nozzle. The etching solution has a composition that oxidizes the spinning surface, forming a passivation layer thereon. The etching solution further contains reactants for removing the passivation layer exposing the underlying surface to further reaction, leading to the desired etching of the surface. The characteristics of the etching solution are adjusted such that reactant diffusion to lower regions of the surface limits the rate of etching. Faster reaction occurs at higher regions of the surface lying in more rapidly moving etching solution resulting in the desired planarization.
    Type: Application
    Filed: July 19, 1999
    Publication date: December 27, 2001
    Inventors: JOSEPH A. LEVERT, DANIEL L. TOWERY
  • Publication number: 20010036749
    Abstract: An apparatus for planarizing or patterning a dielectric film on a substrate is provided. The apparatus includes a press for applying contact pressure to an operably connected compression tool. The compression tool has a working face that is planar or patterned. A controller for regulating the position, timing and force applied by the compression tool to the dielectric film is also provided. There is also provided a support, with an optional workpiece holder for supporting the substrate and dielectric film during contact with the compression tool. Methods of using the apparatus, as well as planarized and/or patterned dielectric films are also provided.
    Type: Application
    Filed: May 18, 2001
    Publication date: November 1, 2001
    Inventors: Joseph A. Levert, Daniel Lynne Towery, Denis Endisch