Abstract: A method for tracking paper currency in a holder, includes: scanning paper currency deposited or removed from a holder; determining the total number of each individual denomination of paper currency contained within the holder based on the scanned paper currency deposited and removed from the holder; recording the total number of each individual denomination of paper currency; determining the total value of the paper currency within the holder; outputting the denomination of paper currency when the paper currency is scanned during depositing or removal from the holder; outputting the recorded number of each individual denomination of paper currency and the total value of the currency within the holder; and wherein the recorded number of each individual denomination of paper currency and the total value of the currency within the holder is dynamically tabulated based on the scanning of paper currency deposited or removed from the holder.

Abstract: A method for tracking paper currency in a holder, includes: scanning paper currency deposited or removed from a holder; determining the total number of each individual denomination of paper currency contained within the holder based on the scanned paper currency deposited and removed from the holder; recording the total number of each individual denomination of paper currency; determining the total value of the paper currency within the holder; outputting the denomination of paper currency when the paper currency is scanned during depositing or removal from the holder; outputting the recorded number of each individual denomination of paper currency and the total value of the currency within the holder; and wherein the recorded number of each individual denomination of paper currency and the total value of the currency within the holder is dynamically tabulated based on the scanning of paper currency deposited or removed from the holder.

Abstract: A system and method of converting large Integrated Circuit (IC) designs into patterns. First, based on shape density, the design is fragmented into pieces, each piece including roughly the same number of shapes. Next, a band of shapes, all within the proximity correction area for each piece, are identified. Each piece, including its identified band, is processed individually to convert data within the piece and within the proximity correction band to Numerical Control (NC) data. The NC data for the proximity correction band is discarded. The piece's NC data is stored as an NC data file for the piece. This is repeated until all of the pieces are converted to NC data. Finally, the pattern is written, one piece at a time.

Abstract: In electron beam lithography, an apparatus and method decompose rectangles at the exterior of a desired electron beam exposure pattern into portions having a substantially constant environment. This process also includes sorting of rectangles into bands in order of addresses of the rectangles and the assignment of labels or tags to the resulting rectangles indicating the edge(s) of the rectangle at which cuts were made to form the rectangle. When these rectangles are further decomposed by increment cutting and processes to receive exposure doses corrected by mutual proximity effects, including recombination of rectangles having the same assigned exposure dose, improved location of cut boundaries is achieved. Overexposure and resultant blooming of the pattern is prevented and exposure dose is assigned with higher accuracy since any averaging of exposure dose will be over a region having a substantially constant environment of neighboring shapes.

Abstract: A method of converting circuit design shapes into optimized numerical control (NC) data for controlling an electron beam (e-beam) exposure system. During post processing of a circuit design layout, shapes with angled edges are covered or filled with rectangles and triangular trapezoidal or paralellograms called FILLSHAPES. Whenever a FILLSHAPE is created, it is as close to the preferred size as possible to increase the likelihood of creating duplicate FILLSHAPEs. A proximity correction value which is calculated for an equivalent rectangle is applied to the FILLSHAPE. After proximity correction, groups of identical FILLSHAPES and User-Defined Macros (UDM's) are created. A summary record is generated for each group. A weight factor is calculated for each group and stored in the summary record. The summary records are sorted according to weight factor.

Abstract: A method of developing grey-splices for use in an electron beam exposure apparatus subdivides rectangles of which a desired pattern is formed and which lie in sub-field overlap zones into sections and examines each section of the sub-field overlap zone to determine the best candidate for greying in order to avoid blooming due to overexposure and to minimize the possibility of exposure discontinuity. A data structure called a greytable list is accumulated to represent the portions of rectangles which lie in each section. Processing of each rectangle is minimized and groups of rectangles are processed in chains to increase the throughput of the system. The e-beam exposure apparatus is operated at optimal efficiency by minimizing the number of exposure spots which are greyed.

Abstract: A system and method of forming shapes on a semiconductor chip by exposing a radiation sensitive layer by an electron beam lithographic tool. Design shapes are converted into rectangles in a single pass through the shapes by a computer postprocessor. The postprocessor processes the design shapes by converting them to edges and sorting the edges from top to bottom and left to right. Chains of top and side edges are built from the sorted edges until a bottom edge is encountered which triggers a fill. When a fill is triggered, subsequent bottom edges are examined to avoid unnecessary sliver generation during the fill or at future fills. Rectangles are generated to fill as much of the area under the chain as possible while minimizing the number of slivers created or which may be created at future fills. Unfilled portions of the chain are left for later fills and edge processing continues until all edges have been processed and the entire design is filled with rectangles.