Abstract: The disclosed embodiments include a valve assembly (300) that includes a piezo stack (308); a piezo actuator (306) encompassing the piezo stack, the piezo actuator having flexural elements (304) that provide a stroke multiplier that amplifies movement of the piezo stack; a valve block (318) having an inlet flow path (320) and an outlet flow path (322); a diaphragm (314) seated atop the valve block, wherein an outer part of the diaphragm is rigid and an inner part of the diaphragm is moveable in a vertical axis; and a bi-lateral flexure (312), wherein a bottom part of the piezo actuator is mechanically attached to the diaphragm via the bi-lateral flexure.

Abstract: The disclosed embodiments include a valve assembly (300) that includes a piezo stack (308); a piezo actuator (306) encompassing the piezo stack, the piezo actuator having flexural elements (304) that provide a stroke multiplier that amplifies movement of the piezo stack; a valve block (318) having an inlet flow path (320) and an outlet flow path (322); a diaphragm (314) seated atop the valve block, wherein an outer part of the diaphragm is rigid and an inner part of the diaphragm is moveable in a vertical axis; and a bi-lateral flexure (312), wherein a bottom part of the piezo actuator is mechanically attached to the diaphragm via the bi-lateral flexure.

Abstract: A force actuated modulating control valve such as a direct acting solenoid valve or pilot actuated bellows valve with a knife edge seat so that the metering location on the seat is at the very outer diameter. In one embodiment, a portion of the valve seat outside of the metering edge is removed to substantially the outside diameter to reduce contact with high velocity fluid flow. In certain embodiments, a flow shield may be positioned just outside of the metering edge of the seat to prevent the high velocity fluid from circulating toward parts of the spool assembly. In some embodiments, the flow shield may be fixed to the body of the instrument so all fluid forces are transmitted to the body. Embodiments of the force actuated modulating control valve may be employed in a mass flow controller for controlling fluid flow.

Abstract: The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresponding to mass flow of the fluid through the flow path, the mass flow meter having a bypass through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.

Abstract: The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresponding to mass flow of the fluid through the flow path, the mass flow meter having a bypass through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.

Abstract: The disclosed embodiments include a force actuated modulating control valve such as a direct acting solenoid valve or pilot actuated bellows valve with a knife edge seat so that the metering location on the seat is at the very outer diameter. In one embodiment, a portion of the valve seat outside of the metering edge is removed to substantially the outside diameter to reduce contact with high velocity fluid flow. In certain embodiments, a flow shield may be positioned just outside of the metering edge of the seat to prevent the high velocity fluid from circulating toward parts of the spool assembly. In some embodiments, the flow shield may be fixed to the body of the instrument so all fluid forces are transmitted to the body. Embodiments of the force actuated modulating control valve may be employed in a mass flow controller for controlling fluid flow.

Abstract: The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (?) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (?) to modify the pressure sensor based mass flow rate.

Abstract: The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (?) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (?) to modify the pressure sensor based mass flow rate.

Abstract: Method and apparatus (121) for providing temperature flow rate compensation for a Coriolis flow meter. The described compensation compensates both flow calibration factor and the nominal time delay, commonly called “zero” in the art. After a Coriolis flow meter is installed into a process, whether for calibration or for actual process use, it need only be zeroed once over its lifetime following its installation. This is a significant improvement over prior Coriolis flow meters that may need to be re-zeroed after minor changes in pressure, temperature, or installation.

Abstract: A Coriolis mass flowmeter (300) having a low mass drive system comprising a driver coil (D) for vibrating flow tube means (102). The Coriolis mass flowmeter does not use a magnet affixed to the flow tube means. Instead, the flow tube means is coated with or is integral to magnetic material (103) that responds to the magnetic fields generated by the driver coil to vibrate the flow tube means. The flow tube means may comprise one (102) or more (1402C1, 1402C2) flow tubes. The magnetic material may be ferrous material devoid of an internal magnetic field. Alternatively the magnetic material may be steel or stainless steel having internal magnetic fields.

Abstract: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

Abstract: A flow sensor tube assembly includes a base member having first and second generally opposing sides. An opening extends through the base member, and an end of a flow sensor tube is received in the opening. A filler material is situated in the opening surrounding the flow sensor tube adjacent the first side of the base member to attach the tube to the base member. The flow sensor tube is welded to the base member adjacent the second side of the base member.

Abstract: A control valve includes an elastomeric flow tube, a plunger having first and second ends, and a pinch member connected to the first end of the plunger. The pinch member is situated adjacent the flow tube. A reference surface is positioned generally opposite the pinch member such that the elastomeric tube is squeezable between the pinch member and the reference surface to control fluid flow through the flow tube. A first guide spring is situated between the pinch member and the first end of the plunger, and a second guide spring is situated adjacent the second end of the plunger. A damper may be connected to the plunger. Further, a pressure containing member may situated about at least a portion of the flow tube.

Abstract: A mass flow measurement device includes a flow sensor tube and a housing having the flow sensor tube situated therein. A drive device is positioned outside the housing for vibrating the flow sensor tube, and at least one pick off sensor is situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. Another mass flow measurement device includes an enclosure having first and second ends. A first sealing member is situated relative to the enclosure first end and a flow body such that the flow body and the first end are connected in a sealed manner. A second sealing member is situated relative to the enclosure second end and a user interface assembly such that the user interface assembly and the second end are connected in a sealed manner.

Abstract: A flow meter pickoff assembly for nulling a flow meter zero offset is provided. The flow meter pickoff assembly includes a mounting device affixed to a first flow meter portion of a flow meter and a first pickoff sensor half adjustably affixed to the mounting device and configured to interact with a second pickoff sensor half affixed to a second flow meter portion. At least one relative angle of the first pickoff sensor half in relation to the second pickoff sensor half can be adjusted by adjusting the first pickoff sensor half to the mounting device according to at least one adjustment axis. The flow meter pickoff assembly further includes an adjustment means for enabling the first pickoff sensor half to adjust with respect to the mounting device along the at least one adjustment axis in order to adjust the at least one relative angle.

Abstract: A Coriolis mass flow sensor includes a flow sensor tube, a drive device situated relative to the flow sensor tube so as to cause the flow sensor tube to vibrate, and capacitance displacement gauges situated relative to the flow sensor tube so as to measure the twist in the flow sensor tube due to Coriolis force. In specific embodiments, electromagnetic, electrostatic, acoustic, and/or piezoelectric drives are used to vibrate the flow sensor tube. In still further embodiments, piezoelectric devices are used both to vibrate the flow sensor tube and measure the twist in the flow sensor tube. In accordance with certain embodiments of the invention, the Coriolis mass flow controller further includes an integrated flow control device adapted to receive fluid from the flow sensor tube and provide flow control.

Abstract: A control valve includes an elastomeric flow tube, a plunger having first and second ends, and a pinch member connected to the first end of the plunger. The pinch member is situated adjacent the flow tube. A reference surface is positioned generally opposite the pinch member such that the elastomeric tube is squeezable between the pinch member and the reference surface to control fluid flow through the flow tube. A first guide spring is situated between the pinch member and the first end of the plunger, and a second guide spring is situated adjacent the second end of the plunger. A damper may be connected to the plunger. Further, a pressure containing member may situated about at least a portion of the flow tube.

Abstract: A Coriolis mass flow sensor includes a flow tube, a light source positioned adjacent a first side of the flow tube and a light detector positioned adjacent a second side of the flow tube. A drive device is operatively situated relative to the flow tube for vibrating the flow tube, such that the flow tube moves through a path defined between the light source and the light detector. In other aspects of the invention, a Coriolis mass flow sensor includes a flow tube and a frame having the flow tube mounted thereon. A drive device is operatively situated relative to the frame for vibrating the frame and at least one pick off sensor is situated relative to the flow tube so as to measure the twist in the flow tube due to Coriolis force. Other aspects of the invention concern a straight-tube Coriolis mass flow sensor. A flexible flow tube defines a generally linear flow path.

Abstract: A mass flow measurement and control device includes an enclosure with a Coriolis mass flowmeter situated therein. The Coriolis mass flowmeter has a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube. A pinch valve includes an elastomeric tube made of a high-purity plastic material in fluid communication with the flow tube. An actuator with a ram operatively connected thereto is situated adjacent the elastomeric tube, and a reference surface is positioned generally opposite the ram such that the elastomeric tube is squeezable between the ram and the reference surface. A controller may also be provided, which receives an output signal from the Coriolis flowmeter and provides a control output signal to the pinch valve actuator in response to the flowmeter output signal and a setpoint signal.

Abstract: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.