Patents by Inventor Joseph C. Moore

Joseph C. Moore has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5279986
    Abstract: The cooling air flow path extends from a blower through a tapered input duct to a large plenum chamber which coaxially surrounds and extends over the top of the deposition apparatus. From this plenum chamber cooling air flows coaxially downward over the surface of the quartz bell jar which forms the reaction chamber, and radially inward through the banks of radiant heater lamps coaxially surrounding the bell jar. Each bank of heater lamps is readily removed for servicing by being rotated into an open position about a pivot axis extending along one verical edge. From the open position, the bank can be slid sideways in slots in the supports and removed from the apparatus.
    Type: Grant
    Filed: July 20, 1992
    Date of Patent: January 18, 1994
    Assignee: Applied Materials, Inc.
    Inventors: James R. Maloney, Joseph C. Moore
  • Patent number: 5178681
    Abstract: A suspension system for hanging a susceptor inside a reactor for processing semiconductor wafers. A hanger is provided with a flange at its lower end for supporting the susceptor. A collar has an internal flange which engages with another flange at the upper end of the hanger. The collar flange and the hanger flange each have a trucated, conical contact surface which are in substanitally continuous contact with each other. The mating flanges permit the susceptor to self-center and provide for different rates of thermal expansion of the collar and hanger.
    Type: Grant
    Filed: January 29, 1991
    Date of Patent: January 12, 1993
    Assignee: Applied Materials, Inc.
    Inventors: Joseph C. Moore, Paul L. Deaton
  • Patent number: 5160545
    Abstract: The cooling air flow path extends from a blower through a tapered input duct to a large plenum chamber which coaxially surounds and extends over the top of the deposition apparatus. From this plenum chamber cooling air flows coaxially downward over the surface of the quartz bell jar which forms the reaction chamber, and radially inward through the banks of radiant heater lamps coaxially surrounding the bell jar. Each bank of heater lamps is readily removed for servicing by being rotated into an open position about a pivot axis extending along one vertical edge. From the open position, the bank can be slid sideways in slots in the supports and removed from the apparatus.
    Type: Grant
    Filed: September 26, 1991
    Date of Patent: November 3, 1992
    Assignee: Applied Materials, Inc.
    Inventors: James R. Maloney, Joseph C. Moore
  • Patent number: D507447
    Type: Grant
    Filed: October 6, 2003
    Date of Patent: July 19, 2005
    Inventors: Joseph C. Moore, Robert E. Lemmons, Bruce A. Johnson