Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.

Abstract: A portable display unit includes a serial port to connect to a device such as a vacuum network controller, cryopump, turbomolecular pump, gauges or compressor. In particular, the display unit can be plugged and unplugged to devices of different types. The portable display unit includes a display and control keys for programming, controlling and monitoring the functions of a device. The device accessible to the display unit includes a display interface having software code and files to interface with the display unit. Accordingly, the portable display unit can be used with any device having software code to interface with the display unit. The software code generates, refreshes and communicates menus to the portable display unit to provide graphical interface of the device's functions. The portable display unit further includes inner and outer hand grips so that the display unit can be held by hands of different sizes.

Abstract: A portable display unit includes a serial port to connect to a device such as a vacuum network controller, cryopump, turbomolecular pump, gauges or compressor. In particular, the display unit can be plugged and unplugged to devices of different types. The portable display unit includes a display and control keys for programming, controlling and monitoring the functions of a device. The device accessible to the display unit includes a display interface having software code and files to interface with the display unit. Accordingly, the portable display unit can be used with any device having software code to interface with the display unit. The software code generates, refreshes and communicates menus to the portable display unit to provide graphical interface of the device's functions. The portable display unit further includes inner and outer hand grips so that the display unit can be held by hands of different sizes.

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.