Abstract: An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

Abstract: A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.

Abstract: A micromachined device of micron dimensions comprising a base and a movable member spaced apart from the base. The movable member has first and second end portions and an axis extending between the first and second end portions. First and second torsional members extend along the axis and are connected to the respective first and second end portions for permitting the movable member to rock between first and second positions about the axis relative to the base. The first and second torsional members are secured to the base. At least a portion of the movable member is of a conductive material. First and second spaced-apart electrodes are carried by the base for driving the movable member between the first and second positions. A tether member extends transversely of the axis and is secured to the first torsional member and to the base whereby the tether member regulates the rocking of the movable member.

Abstract: A damped micromechanical device comprising a housing provided with an internal fluid-tight chamber and an electrically-driven microactuator disposed in the fluid-tight chamber. The microactuator has a movable structure capable of being moved between first and second positions at a resonant frequency. A damping fluid is disposed in the fluid-tight chamber for damping the movement of the movable structure at the resonant frequency.

Abstract: A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.

Abstract: The present invention includes a structure, apparatus, and method by which the reflectivity of a micro-machined reflector can be improved. The present invention increases the mirror's reflectivity at 650 nm, increases its reflectivity at 410 nm, and improves its long-term reliability. The reflectivity at other wavelengths may also be improved. Also, the present invention minimizes mirror plate distortion while providing a suitable fabrication approach.

Abstract: A method for processing a plurality of mirror assemblies formed together from a silicon wafer. The method includes the steps of exposing the mirror assemblies to an acid release etch to produce released mirror assemblies and rinsing the released mirror assemblies to produce washed mirror assemblies. The washed mirror assemblies are dried to produce dried mirror assemblies and the dried mirror assemblies are mounted onto a mounting tape to produce mounted mirror assemblies. The mounted mirror assemblies are diced or scribed to produce a plurality of separated mirror assemblies, which are separated from the mounting tape so as to produce a plurality of discrete mirror assemblies.

Abstract: An optical microswitch for use with a laser beam that extends along a path comprising a body having an inlet port adapted to receive the laser beam and a plurality of outlet ports. A plurality of mirrors coupled to a plurality of micromotors carried by the body. The micromotors selectively move the mirrors from a first position out of the path of the laser beam to a second position into the path of the laser beam to direct the laser beam to one of the outlet ports. Each of the micromotors has at least one electrostatically-driven comb drive assembly therein for moving the respective mirror to one of the first and second positions. A controller is electrically coupled to the micromotors for providing control signals to the micromotors.

Abstract: A mirror assembly of micron dimensions for use in deflecting beam of light. The mirror assembly includes a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions and a longitudinal axis extending between the first and second end portions. First and second torsional members extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes are carried by the planar base for driving the mirror between the first and second positions. A tether member extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base.

Abstract: An apparatus designed for the testing of a micro-machined mirror that is mounted onto a flying optical head is described. As in the case of normal operation of the head, laser light is coupled into the head using an optical fiber. The light propagates through the head, is emitted from the fiber, reflects off of the steerable mirror inclined at 45 degrees to the fiber axis, and passes through a focusing lens and exits the head. A position sensitive detector (PSD) is placed so as to detect the position of the light spot as it exits the head. Actuation of the mirror's steering capabilities modulates the spot position, which is detected by the PSD and its associated electronics. The profile of the PSD is made small enough to fit in a space between two opposing optical heads on a head stack assembly (HSA) so that the test can be performed immediately prior to the assembly of the disc drive. An array of such PSD's is constructed so that all of heads on an HSA can be tested simultaneously or in a multiplexed manner.

Abstract: A method for manufacturing a magneto-optical data storage system. The method includes the steps of providing a support surface and rotatably mounting a magneto-optical disk having a planar storage surface with a plurality of concentrically disposed data tracks onto the support surface. A proximal extremity of an arm is pivotably mounted on the support surface so that a distal extremity of the arm pivots between first and second positions relative to the storage surface. An optical light emitter and receiver emitting a laser beam is carried by the distal extremity of the arm. A flying magneto-optical head is mounted on the distal extremity of the arm. A mirror assembly is attached to the head. The mirror of the mirror assembly can be rocked between first and second positions for reflecting the laser beam between the optical light emitter and receiver and the storage surface of the magneto-optical disk so as to permit the optical recording and/or reading of information on the storage surface.

Abstract: A magneto-optical data storage system having a magneto-optical disk rotatably mounted on a support body. The disk has a planar storage surface with a plurality of concentrically disposed data tracks. A flying magneto-optical head is mounted on the distal extremity of an arm pivotably mounted on the support body for aerodynamic suspension adjacent the storage surface during rotation of the disk on the support body. A mirror assembly of micron dimensions is carried by the head for reflecting a laser beam between an optical light emitter and receiver carried by the arm and the storage surface of the disk to permit the optical recording and/or reading of information on the data tracks. The mirror assembly has a planar base and a planar mirror spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has a longitudinal axis extending between first and second end portions.

Abstract: An optical head utilizes a micro-machined element in combination with a light source and a lens to write and read data onto a storage disk. The micro-machined element may include a tethered steerable micro-machined mirror. A beam of laser light transmitted from the light source to the optical head and a reflected light from the storage disk is altered by a movement of the micro-machined mirror. In this manner a focused optical spot is scanned back and forth in a direction which is approximately parallel to the radial direction of the storage disk.

Abstract: An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.