Patents by Inventor Joseph D. Shindler

Joseph D. Shindler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dynamic sampling with efficient model for overlay
    Patent number: 7571420
    Abstract: The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
    Type: Grant
    Filed: February 16, 2007
    Date of Patent: August 4, 2009
    Assignee: Intel Corporation
    Inventors: Alan Wong, Jeff Drautz, Joseph D. Shindler, Max Lau, George Chen
  • DYNAMIC SAMPLING WITH EFFICIENT MODEL FOR OVERLAY
    Publication number: 20080201117
    Abstract: The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
    Type: Application
    Filed: February 16, 2007
    Publication date: August 21, 2008
    Inventors: Alan Wong, Jeff Drautz, Joseph D. Shindler, Max Lau, George Chen
  • Optimization of sample plan for overlay
    Patent number: 7197722
    Abstract: The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
    Type: Grant
    Filed: September 30, 2004
    Date of Patent: March 27, 2007
    Assignee: Intel Corporation
    Inventors: Alan Wong, Jeff Drautz, Joseph D. Shindler, Max Lau, George Chen