Abstract: An electrically powered caliper is provided which includes a scale member, a slider, a displacement sensor, a force sensing arrangement and a signal processing portion. The signal processing portion is configured to receive a force signal and indicate a respective force corresponding to the respective position of the slider. Force data is acquired comprising a plurality of respective forces corresponding to respective positions of the slider. The signal processing portion defines an acceptable measurement force range defined by at least a minimum force threshold that is determined such that it exceeds a compensation force corresponding to at least one force component included in the force signal that is independent of user variations of the measurement force. It may analyze acquired force data to identify pre-contact data, and set the minimum force threshold for a current measurement procedure based on that pre-contact data.

Abstract: A readhead and scale arrangement comprises: a readhead comprising a light source configured to output diverging source light comprising a plurality of individually detected wavelengths and at least a first optical signal receiver channel configured to provide a first set of position signals; and a scale track extending along the measuring axis direction on a scale member comprising a scale grating, the scale track configured to diffract the first diverging source light to provide first and second diffracted scale light portions of each of the individually detected wavelengths to the first optical signal receiver channel which provide interference fringes. The readhead comprises an optical path difference element, arranged such that respective wavelengths undergo different phase shifts. Such an encoder is robust to scale track contamination and other signal degradation.

Abstract: An electrically powered caliper is provided which includes a scale member, a slider, a displacement sensor, a force sensing arrangement and a signal processing portion. The signal processing portion is configured to receive a force signal and indicate a respective force corresponding to the respective position of the slider. Force data is acquired comprising a plurality of respective forces corresponding to respective positions of the slider. The signal processing portion defines an acceptable measurement force range defined by at least a minimum force threshold that is determined such that it exceeds a compensation force corresponding to at least one force component included in the force signal that is independent of user variations of the measurement force. It may analyze acquired force data to identify pre-contact data, and set the minimum force threshold for a current measurement procedure based on that pre-contact data.

Abstract: A readhead and scale arrangement comprises: a readhead comprising a light source configured to output diverging source light comprising a plurality of individually detected wavelengths and at least a first optical signal receiver channel configured to provide a first set of position signals; and a scale track extending along the measuring axis direction on a scale member comprising a scale grating, the scale track configured to diffract the first diverging source light to provide first and second diffracted scale light portions of each of the individually detected wavelengths to the first optical signal receiver channel which provide interference fringes. The readhead comprises an optical path difference element, arranged such that respective wavelengths undergo different phase shifts. Such an encoder is robust to scale track contamination and other signal degradation.

Abstract: A method and apparatus for suppressing loss of scale image contrast due to interference effects from optical path length differences, including lens profile aberrations, are provided in a displacement sensing optical encoder that uses a telecentric imaging configuration. According to the invention, the encoder is configured such that the image light that reaches the detector comprises symmetric ray bundles concentrated symmetrically on opposite sides of the optical axis center at the limiting aperture of the telecentric imaging configuration. Central ray bundles, and/or other ray bundles that have an optical path lengths significantly different than the operational symmetric ray bundles are prevented or blocked. As a result destructive interference is prevented and image contrast is improved.

Abstract: An optical encoder system with a passive readhead is provided. The passive readhead does not have an attached cable and is an all optical readhead where the measurement position information relative to a scale is read remotely by direct line-of-sight optical transmission to a remote companion system. The remote companion system includes a light source and a sensing portion. In one embodiment, the sensing portion may comprise a remote lens portion and a photodetector arrangement. The remote companion system is configured to optically sense intensities of imaged regions from the passive readhead, and to output a plurality of signals indicative of the measurement position based on the sensed intensities.

Abstract: A micro light interface assembly for a microscopic machine vision inspection system includes a micro light assembly. The micro light assembly provides addressable light emitting elements arranged around the periphery of an aperture having an aperture dimension DAPMIN that is smaller than a barrel dimension DBAR of the inspection system objective lens. The aperture may be located along the optical axis and within the working distance of the objective lens such that the light emitting elements are closely arranged around a field of view. The micro light interface assembly may be held and operated through a connection element that may be used for the interchanging the micro light interface assembly with a touch probe, in some embodiments.

Abstract: Various exemplary embodiments may provide systems and methods for strobe illumination of a workpiece. The systems may include an illumination source, an image acquisition device and a control system. The illumination source may emit visible, UV, or near-IR light as a transient flash to the workpiece, the transient flash occurring in response to a lamp trigger. The illumination source may emit the light at an illumination intensity that rises from a begin threshold to a peak and afterwards diminishes to an end threshold during a flash duration. The image acquisition device may capture the light associated with the workpiece for an exposure duration starting from an exposure trigger. The control system may control the illumination source and the image acquisition device to synchronize the lamp trigger so that the exposure duration ends during the flash duration, such that a remaining portion of the flash does not affect the image exposure.

Abstract: A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.

Abstract: A method and apparatus for suppressing loss of scale image contrast due to interference effects from optical path length differences, including lens profile aberrations, are provided in a displacement sensing optical encoder that uses a telecentric imaging configuration. According to the invention, the encoder is configured such that the image light that reaches the detector comprises symmetric ray bundles concentrated symmetrically on opposite sides of the optical axis center at the limiting aperture of the telecentric imaging configuration. Central ray bundles, and/or other ray bundles that have an optical path lengths significantly different than the operational symmetric ray bundles are prevented or blocked. As a result destructive interference is prevented and image contrast is improved.

Abstract: A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead may include “primary” fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. In some embodiments, a zone grating type reference mark may be embedded in a periodic scale grating, and configured such that it provides strong reference mark primary signals without disrupting periodic incremental measurement signals associated with the periodic scale grating. In one embodiment, the readhead may include “secondary” fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers.

Abstract: An encoder configuration comprises an illumination portion, absolute scale pattern comprising absolute tracks, and a detector having a width dimension YDETABS. An absolute track pattern comprises geometrically congruent sub tracks, and the congruent sub tracks are arranged such that if one is translated by the width dimension YDETABS, then they will nominally coincide. The congruent sub tracks may be separated by a dimension YCENT that is less than YDETABS, and may each have a dimension YTOL, such that [YCENT+2(YTOL)] is greater than YDETABS. Thus, the detector may be narrower than the absolute track pattern, but because the detector edges are each nominally located over congruent sub tracks the detected signal is not sensitive to lateral misalignment of the detector within the pattern. These principles provide great freedom in configuring advantageous individual pattern features in the absolute track, even though the detector is narrower than the absolute track.

Abstract: A micro light interface assembly for a microscopic machine vision inspection system includes a micro light assembly. The micro light assembly provides addressable light emitting elements arranged around the periphery of an aperture having an aperture dimension DAPMIN that is smaller than a barrel dimension DBAR of the inspection system objective lens. The aperture may be located along the optical axis and within the working distance of the objective lens such that the light emitting elements are closely arranged around a field of view. The micro light interface assembly may be held and operated through a connection element that may be used for the interchanging the micro light interface assembly with a touch probe, in some embodiments.

Abstract: An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into +/? 1st order beams, a pair of mirrors that reflect the +/? 1st order beams to converge toward the scale grating. The +/? 1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only +/? 1st order light reaches the receiver channels.

Abstract: A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

Abstract: A method for writing or calibrating the scale of a scale-based position encoder. The scale is installed where it will be used to provide ongoing position measurements for a host system. The image correlation sensor is temporarily mounted proximate to the mounting position of the scale-based position encoder readhead on the host system, and is moved along the measuring axis relative to the scale, to provide corresponding displacement measurement information. The displacement measurement information is used to govern a scale writing process or a calibration process for the scale-based position encoder, such that the displacement measurement information at least partially governs the values of respective ongoing position measurements provided by the scale-based position encoder at respective positions along the measuring axis. A two-axis image correlation displacement sensor is advantageously used to detect and/or corrected various potential errors during the calibration or writing process.

Abstract: An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into ±1st order beams, a pair of mirrors that reflect the ±1st order beams to converge toward the scale grating. The ±1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only ±1st order light reaches the receiver channels.

Abstract: A system and method for improving the accuracy of a speckle-based image correlation displacement sensor provides ultra-high accuracy by ensuring that, in the absence of motion, the speckle image does not vary over time. In one embodiment, the speckle image is stabilized by reducing or compensating for laser diode wavelength changes. Various methods for stabilizing the wavelength include thermoelectric temperature control, measuring and correcting the wavelength by any suitable means, or providing a specific wavelength of light feedback from an external grating. Image stabilization may also be accomplished by monitoring the warm-up process of the system. Once the system is determined to have completed the warm-up process, an indicator is provided to the user to indicate that the system is ready for use. Sensor geometric configurations that reduce or eliminate wavelength-related errors are also disclosed.

Abstract: An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wavelengths simultaneously, to allow reduction or elimination of certain common-mode error components, including dynamic error components. The device may scan at least one of the laser wavelengths over a relatively narrow range and may use quadrature detectors to provide enough signal data to allow certain self-corrections to be performed on the resulting scanned signals and measurements. A novel tunable laser and/or quadrature detector may provide advantages in combination with the device.

Abstract: All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.