Patents by Inventor Joseph E. Mastro

Joseph E. Mastro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140227955
    Abstract: A modular exhaust gas header designed for use with a process tool having a plurality of exhaust gas points of connection. Embodiments of the modular exhaust gas header include a plurality of branch ducts, at least one for each point of connection in the process tool. Branch ducts, and primary ducts with which they are fluidly connected, may be made from materials designed to withstand exhaust gases that have a high temperature, are corrosive, and/or include volatile solvents. If desired, flow control devices and pressure monitoring instrumentation that selectively measures pressure may be used in each branch duct. The header local to the processing system may be incorporated in a method of designing a layout for a manufacturing process tool and associated exhaust gas handling systems.
    Type: Application
    Filed: April 14, 2014
    Publication date: August 14, 2014
    Applicant: NEHP Inc.
    Inventors: Adam L. Tarr, Andrew J. Beers, Joseph E. Mastro
  • Patent number: 8696417
    Abstract: A modular exhaust gas header designed for use with a process tool having a plurality of exhaust gas points of connection. Embodiments of the modular exhaust gas header include a plurality of branch ducts, at least one for each point of connection in the process tool. Branch ducts, and primary ducts with which they are fluidly connected, may be made from materials designed to withstand exhaust gases that have a high temperature, are corrosive, and/or include volatile solvents. If desired, flow control devices and pressure monitoring instrumentation that selectively measures pressure may be used in each branch duct. The header local to the processing system may be incorporated in a method of designing a layout for a manufacturing process tool and associated exhaust gas handling systems.
    Type: Grant
    Filed: July 11, 2008
    Date of Patent: April 15, 2014
    Assignee: NEHP Inc.
    Inventors: Adam L. Tarr, Andrew J. Beers, Joseph E. Mastro
  • Publication number: 20100009615
    Abstract: A modular exhaust gas header designed for use with a process tool having a plurality of exhaust gas points of connection. Embodiments of the modular exhaust gas header include a plurality of branch ducts, at least one for each point of connection in the process tool. Branch ducts, and primary ducts with which they are fluidly connected, may be made from materials designed to withstand exhaust gases that have a high temperature, are corrosive, and/or include volatile solvents. If desired, flow control devices and pressure monitoring instrumentation that selectively measures pressure may be used in each branch duct. The header local to the processing system may be incorporated in a method of designing a layout for a manufacturing process tool and associated exhaust gas handling systems.
    Type: Application
    Filed: July 11, 2008
    Publication date: January 14, 2010
    Applicant: NEHP INC.
    Inventors: Adam L. Tarr, Andrew J. Beers, Joseph E. Mastro