Abstract: Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronic specialty gases to one or more semiconductor processing tools.

Abstract: Provided are a novel system and method for delivery of a vapor phase product to a point of use, as well as a novel on-site chemical distribution system and method. The system for delivery of a vapor phase product includes a storage vessel containing a liquid chemical under its own vapor pressure, a column connected to receive the chemical in liquified state from the storage vessel, wherein the chemical is fractionated into a contaminated liquid heavy fraction and a purified light vapor fraction and a conduit connected to the column for removing the purified light vapor fraction therefrom. The system is connected to the point of use for introducing the purified vapor fraction thereto. Particular applicability is found in semiconductor manufacturing in the delivery of electronics specialty gases to one or more semiconductor processing tools.

Abstract: A cryogenic freezing method uses a mixture of liquid nitrogen and liquid oxygen in amounts approximating the composition of atmospheric air to freeze food products. The mixture preferably includes 18% to 25% oxygen and the balance nitrogen, with small amounts of residuals which are commonly found in air. The present invention involves replacing a liquid carbon dioxide or liquid nitrogen cooling medium which is used in known cryogenic freezers with a liquid nitrogen and liquid oxygen mixture. The liquid nitrogen and oxygen mixture can be used according the present invention in many of the known freezers using liquid carbon dioxide or liquid nitrogen as a cooling medium, including tunnel freezers, spiral freezers, and immersion freezers. The use of a liquid nitrogen and liquid oxygen mixture improves the efficiency of a freezer because the cold vapors are not exhausted from the freezer. In addition, the leakage of vapors from the freezer into the room air will not create unsafe conditions for workers.

Abstract: Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

Abstract: Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

Abstract: Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

Abstract: Disclosed is a system and method for using a system for delivery of fluid from cylinders comprising a plurality of supply cylinders containing fluid at or near supercritical conditions, each cylinder comprising a fluid outlet; sensing means for sensing at least one fluid property for each of said plurality of supply cylinders; heating means adapted to each of said plurality of supply cylinders and coupled to said sensing means to adjust the pressure of said fluid in said supply cylinders in response to said at least one fluid property to maintain said fluid at or near supercritical conditions; pump means to deliver fluid from said cylinder outlet to an application.

Abstract: A process for recovering CO.sub.2 from a CO.sub.2 liquifaction plant vent gas, which comprises feeding vent gas from a CO.sub.2 liquifaction plant to a first semi-permeable gas separation membrane through which and at a pressure at which CO.sub.2 is capable of diffusing therethrough, to form a CO.sub.2 -enriched permeate, and then returning the CO.sub.2 -enriched permeate to a feed side of said CO.sub.2 liquifaction plant at a pressure capable of effecting the same.

Abstract: A method for the substantial separation of at least one gas component from a gas mixture to generate a residue gas substantially depleted of the gas components to be separated. A semipermeable membrane is provided which has a feed gas side and a sweep gas side. The feed gas side is contacted with a feed gas mixture containing at least one gas to be retained and at least one gas to be separated therefrom. The sweep side is simultaneously contacted with a sweep gas having a pressure lower than that of the feed gas. The partial pressure of certain gas components present on both sides of the membrane are balanced to cause the remaining gas components to diffuse in either direction across the membrane depending upon their differential partial pressures. Apparatus for the gas separation is also provided.