Abstract: A method and an apparatus are provided for the delivery of a vapor phase product having a substantially constant impurity level from a liquefied source of said gas to an endpoint. The delivery method includes withdrawing a liquefied gas having a level of impurities from a storage container and delivering the liquefied gas to a vaporization unit where the liquefied gas and the impurities dissolved therein are completely vaporized. The vapor phase product is then delivered to an endpoint. This invention affords the delivery of gases with substantially constant impurity levels throughout the delivery of the liquefied gas. In addition, this invention affords the delivery of the liquefied gas at high vapor phase flow rates for long periods of time and allows substantially complete usage of the contents of the storage container.

Abstract: A method and an apparatus are provided for the delivery of a vapor phase product having a substantially constant impurity level from a liquefied source of said gas to an endpoint. The delivery method includes withdrawing a liquefied gas having a level of impurities from a storage container and delivering the liquefied gas to a vaporization unit where the liquefied gas and the impurities dissolved therein are completely vaporized. The vapor phase product is then delivered to an endpoint. This invention affords the delivery of gases with substantially constant impurity levels throughout the delivery of the liquefied gas. In addition, this invention affords the delivery of the liquefied gas at high vapor phase flow rates for long periods of time and allows substantially complete usage of the contents of the storage container.

Abstract: Method and apparatus for increasing the velocity of sweeping gas as it moves across a gas delivery system contained in a hazardous material delivery enclosure, e.g. a gas cabinet valve manifold box or gas isolation box. An exhaust port with selectively opened and closed apertures juxtaposed to non-soldered or non-welded fittings or connections in the gas delivery system is placed in or on said enclosure to create an accelerated and directed flow of sweeping gas across the non-soldered or non-welded fittings or connections.