Abstract: A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.

Abstract: A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.

Abstract: A MEMS device includes a silicon substrate. The silicon substrate includes a plurality of dielectric material grooves spaced apart from each other. The silicon substrate also includes a through hole with a portion of the through hole being located between the plurality of dielectric material grooves when viewed from a direction perpendicular to a surface of the silicon substrate.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a first wall. A portion of the first wall defines an outlet opening. The liquid dispensing channel includes a second wall opposite the first wall. The second wall of the liquid dispensing channel extends along a portion of the liquid supply channel and along a portion of the liquid return channel. A liquid supply passage extends through the second wall and is in fluid communication with the liquid supply channel. A plurality of liquid return passages extends through the second wall and is in fluid communication with the liquid return channel. A liquid supply provides liquid that flows from the liquid supply passage through the liquid supply channel, through the liquid dispensing channel, and through the liquid return channel to the plurality of liquid return passages.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a first wall. A portion of the first wall defines an outlet opening. The liquid dispensing channel includes a second wall opposite the first wall. The second wall of the liquid dispensing channel extends along a portion of the liquid supply channel and along a portion of the liquid return channel. A liquid supply passage is provided that extends through the second wall and is in fluid communication with the liquid supply channel. A plurality of liquid return passages are provided that extend through the second wall and are in fluid communication with the liquid return channel. A liquid is provided that flows from the liquid supply passage through the liquid supply channel through the liquid dispensing channel through the liquid return channel to the plurality of liquid return passages.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid return channel; and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. The outlet opening includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate. Each liquid dispensing element includes a liquid dispensing channel including an outlet opening. Liquid supply and return channels are positioned on the substrate in fluid communication with the liquid dispensing channel. Liquid supply and return passages extend through the substrate in fluid communication with the liquid supply and return channels, respectively. A liquid manifold includes liquid supply and return ducts in fluid communication with each liquid supply and return passage of each liquid dispensing element, respectively. A liquid supply provides liquid that flows from the liquid supply duct of the liquid manifold through each liquid dispensing element to the liquid return duct of the liquid manifold. A selectively activated diverter member, associated with the liquid dispensing channel, diverts a portion of the liquid flowing through the dispensing channel through the outlet opening.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes an upstream edge relative to a direction of liquid flow through the liquid dispensing channel. The upstream edge includes a radius of curvature when viewed from a direction perpendicular to the surface of the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: Each liquid dispensing element of an array includes liquid supply, dispensing, and return channels positioned on a substrate. The liquid dispensing channel, in communication with the supply and return channels, includes an outlet opening and is associated with a diverter member. Liquid supply and return passages, in communication with liquid supply and return channels, respectively, extend through the substrate. Liquid supply and return ducts of a liquid manifold are in communication with each liquid supply passage and liquid return passage, respectively. Liquid flows from the liquid supply duct through each liquid dispensing element to the liquid return duct. A liquid drop is ejected from the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the associated diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. Another portion of the wall defines a drain located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel including an outlet opening including an end, and a liquid return channel. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel. A structure extends from the end of the outlet opening and is shaped to direct the portion of the liquid diverted from the liquid dispensing channel through a steep angle relative to the direction of travel of the liquid provided by the liquid supply channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel including an outlet opening, and a liquid return channel. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A selectively actuatable diverter member imparts heat energy directly to a first portion of the liquid to divert a second portion of the liquid toward outlet opening of the liquid dispensing channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel including an outlet opening, a liquid return channel, and a liquid cooling channel positioned relative to the liquid dispensing channel. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable using heat energy to divert a portion of the liquid toward outlet opening of the liquid dispensing channel, the diverter member including a first side that faces the liquid dispensing channel and a second side that faces the liquid cooling channel.

Abstract: A liquid dispenser includes a liquid supply channel, a liquid dispensing channel including an outlet opening, and a liquid return channel. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel. A surface is positioned downstream relative to the outlet opening of the liquid dispensing channel and leads to atmosphere. A portion of the surface, when compared to another portion of the surface, includes structure that reduces viscous drag on the portion of the liquid that has been diverted by the diverter member such that drops formed from consecutive portions of the liquid that have been diverted by the diverter member travel with consistent drop characteristics.

Abstract: A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate is provided. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate. The liquid dispensing channel includes an outlet opening positioned on a wall opposite the substrate. A diverter member is associated with the liquid dispensing channel. A liquid return channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply passage extends through the substrate and is in fluid communication with the liquid supply channel. A liquid return passage extends through the substrate and is in fluid communication with the liquid return channel. A liquid manifold is provided that includes a liquid supply duct and a liquid return duct.