Patents by Inventor Joseph Johannes Antonius Maria Vrakking

Joseph Johannes Antonius Maria Vrakking has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit
    Patent number: 6304630
    Abstract: A method is described for generating EUV radiation, comprising the steps of: generating a flow (35) of liquid droplets (39); injecting the flow into a source space (33) connected to a vacuum pump (34), and successively irradiating individual droplets (39) with an intense, pulsed, laser beam (41) focused on a droplet, thus creating a plasma (47) which emits EUV radiation. In order to prevent that liquid vapor destroys the vacuum in the source space (33) and to guarantee a continuous flux of EUV radiation, the flow (35) is guided through additional vacuum spaces (53, 56, 63) in series with the source space. Also described are an EUV radiation source unit for realizing the method and the application of the method in the manufacture of devices, like IC devices, and in a lithographic projection apparatus.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: October 16, 2001
    Assignee: U.S. Philips Corporation
    Inventors: Theodorus Hubertus Josephus Bisschops, Joseph Johannes Antonius Maria Vrakking, Mark Theo Meuwese