Abstract: Hierarchical semiconductor structure design is disclosed. One aspect of the invention is a computerized system that includes a semiconductor structure (such as a semiconductor test structure) and a basic atom. The system also includes a hierarchy of abstractions ordered from highest to lowest. Each abstraction relates a plurality of instances of an immediately lower abstraction; the highest abstraction corresponds to the structure, and the lowest abstraction corresponds to the basic atom. A plurality of sets of parameters also is included within the system, where each set of parameters corresponds to an instance of an abstraction. Changing one of the set of parameters for an instance changes at least one of the set of parameters for an instance of an immediately lower abstraction.

Abstract: Hierarchical semiconductor structure design is disclosed. One aspect of the invention is a computerized system that includes a semiconductor structure (such as a semiconductor test structure) and a basic atom. The system also includes a hierarchy of abstractions ordered from highest to lowest. Each abstraction relates a plurality of instances of an immediately lower abstraction; the highest abstraction corresponds to the structure, and the lowest abstraction corresponds to the basic atom. A plurality of sets of parameters also is included within the system, where each set of parameters corresponds to an instance of an abstraction. Changing one of the set of parameters for an instance changes at least one of the set of parameters for an instance of an immediately lower abstraction.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1×1016 ions/cm3; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1×1019 ions/cm3 and the drain having a third average n-type dopant concentration of at least 1×1019 ions/cm3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell comprises a semiconductor substrate of a first conductivity type; a buried layer in the substrate, the buried layer having a second conductivity type opposite to the first conductivity type; a transistor formed over the buried layer, the transistor having a source of the second conductivity type, a gate, and a drain of the second conductivity type, the source having a depth in the substrate greater than the depth of the drain; and alternating layers of insulative and conductive material formed proximate the source, including two conductive layers and two insulative layers, one of the insulative layers being in junction relation to the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1.times.10.sup.16 ions/cm.sup.3 ; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3 and the drain having a third average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell comprises a semiconductor substrate of a first conductivity type; a buried layer in the substrate, the buried layer having a second conductivity type opposite to the first conductivity type; a transistor formed over the buried layer, the transistor having a source of the second conductivity type, a gate, and a drain of the second conductivity type, the source having a depth in the substrate greater than the depth of the drain; and alternating layers of insulative and conductive material formed proximate the source, including two conductive layers and two insulative layers, one of the insulative layers being in junction relation to the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1.times.10.sup.16 ions/cm.sup.3 ; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3 and the drain having a third average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1.times.10.sup.16 ions/cm.sup.3 ; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3 and the drain having a third average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell comprises a semiconductor substrate of a first conductivity type; a buried layer in the substrate, the buried layer having a second conductivity type opposite to the first conductivity type; a transistor formed over the buried layer, the transistor having a source of the second conductivity type, a gate, and a drain of the second conductivity type, the source having a depth in the substrate greater than the depth of the drain; and alternating layers of insulative and conductive material formed proximate -the source, including two conductive layers and two insulative layers, one of the insulative layers being in junction relation to the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1.times.10.sup.16 ions/cm.sup.3 ; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3 and the drain having a third average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.

Abstract: A static memory cell having no more than three transistors. A static memory cell is formed by providing a semiconductor substrate; forming a buried n-type layer in the substrate, the n-type layer having a first average n-type dopant concentration of at least 1.times.10.sup.16 ions/cm.sup.3 ; forming an n-channel transistor relative to the substrate over the buried n-type layer, the n-channel transistor having a source, a gate, and a drain, the source having a second average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3 and the drain having a third average n-type dopant concentration of at least 1.times.10.sup.19 ions/cm.sup.3, and the source having a depth deeper than the drain so as to be closer to the buried n-type layer than the drain; and forming a p-type region in junction with the source to define a tunnel diode between the p-type region and the source.