Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: A membrane structure for moving a gaseous object species from a first region having an object species first concentration, through the membrane structure, to a second region having an object species second concentration different from the first concentration is described. The membrane includes a supporting substrate having a plurality of pores therethrough, each of the plurality of pores defined by a first end, a second end and a surface of the supporting substrate extending between the first end and the second end as well as a nanoporous layer within the plurality of pores, wherein the nanoporous layer comprises a hydrophilic layer and a hydrophobic layer. The membrane also includes a liquid transport medium within the hydrophilic layer. The liquid transport medium includes a liquideous permeation medium and at least one enzyme within the liquideous permeation medium. The at least one enzyme is reinforced by at least one stabilizing component.

Abstract: An atomic layer deposition method is disclosed for preparing polypeptides. The method comprises providing a solid-phase support comprising a reactive amine monolayer in an atomic layer deposition (ALD) chamber. The solid-phase support is contacted with a first protected amino acid substituted with a protecting group by atomic layer deposition, wherein the protecting group is bonded to a non-side chain amino group of the protected amino acid. A carboxylic acid group of the first protected amino acid is reacted with the reactive amine monolayer, thereby coupling the first protected amino acid to the solid-phase support to produce a coupled-product.

Abstract: An atomic layer deposition method is disclosed for preparing polypeptides. The method comprises providing a solid-phase support comprising a reactive amine monolayer in an atomic layer deposition (ALD) chamber. The solid-phase support is contacted with a first protected amino acid substituted with a protecting group by atomic layer deposition, wherein the protecting group is bonded to a non-side chain amino group of the protected amino acid. A carboxylic acid group of the first protected amino acid is reacted with the reactive amine monolayer, thereby coupling the first protected amino acid to the solid-phase support to produce a coupled-product.

Abstract: An ultra-thin, catalyzed liquid transport medium-based membrane structure fabricated with a porous supporting substrate may be used for separating an object species such as a carbon dioxide object species. Carbon dioxide flux through this membrane structures may be several orders of magnitude higher than traditional polymer membranes with a high selectivity to carbon dioxide. Other gases such as molecular oxygen, molecular hydrogen, and other species including non-gaseous species, for example ionic materials, may be separated using variations to the membrane discussed.

Abstract: Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.

Abstract: Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.

Abstract: Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.

Abstract: Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-patterned. The surface activation can be performed using remote plasma exposure to locally activate the exterior surfaces of porous support. Organic/inorganic hybrid precursors such as organometallic silane precursors can be condensed on the locally activated exterior surfaces, whereby ALD reactions can then take place between the condensed hybrid precursors and a reactant. Various embodiments can also include an intermittent replacement of ALD precursors during the membrane formation so as to enhance the hybrid molecular network of the membranes.

Abstract: Barrier layers and methods for forming barrier layers on a porous layer are provided. The methods can include chemically adsorbing a plurality of first molecules on a surface of the porous layer in a chamber and forming a first layer of the first molecules on the surface of the porous layer. A plasma can then be used to react a plurality of second molecules with the first layer of first molecules to form a first layer of a barrier layer. The barrier layers can seal the pores of the porous material, function as a diffusion barrier, be conformal, and/or have a negligible impact on the overall ILD k value of the porous material.

Abstract: A high density elongated plasma is produced by the interaction of an electrically conductive planar antenna located outside of a processing chamber, and a magnetic field generating means, also located outside of the processing chamber. A magnetic field perpendicular to the plane of the antenna is generated within the processing chamber by the magnetic field generating means. The antenna is electrically coupled to a radio frequency power source to generate a helicon wave in the processing chamber to produce a plasma of a gas in the processing chamber. The magnetic field generated by the magnetic field generating means elongates the plasma within the processing chamber.

Abstract: A plasma processing apparatus and method using a predetermined proportion of relative power between a TE.sub.11 mode and a TM.sub.01 mode to produce radial uniformity of the plasma. A microwave coupler transforms microwave energy from a microwave source into approximately equal proportions of TE.sub.11 and TM.sub.01 modes. In one embodiment, the coupler includes a first arm for generating the TE.sub.11 mode and a second arm for generating the TM.sub.01 mode which are then combined in a cylindrical waveguide section having a sufficient inner diameter to support propagation of both modes. Other circuit components are provided to prevent cross-coupling of the TE.sub.11 mode into the TM.sub.01 generating arm, and vice versa. Thus, the relative proportion of power of each mode may be independently controlled. A magnetic field generator may be used in the apparatus to create an electron cyclotron resonance condition within the plasma.

Abstract: A microwave source is coupled to an electron cyclotron resonance (ECR) system by circularly polarizing the microwave energy from the source in an angular direction with cooperates with the ECR system's magnetic field to produce electron cyclotron resonance, and coupling the circularly polarized microwave energy to the plasma using a quarter wave vacuum window transformer having a dielectric constant which matches the impedance of the circularly polarized microwave energy to the impedance of the plasma. The impedance matching transformer is preferably a vacuum window of the ECR chamber having quarter wave thickness and the appropriate dielectric constant. For high density plasmas in a standard ECR system of 6 cm radius an alumina window 0.98 cm thick procides optimum coupling. The reflected power from the plasma is thereby minimized to provide a dense plasma for the ECR tool while reducing or eliminating the need for manual external tuners for the microwave source.

Abstract: Tritium and deuterium are separated from a gaseous mixture thereof, derived from a nuclear fusion reactor or some other source, by providing a casing with a bulk getter therein for absorbing the gaseous mixture to produce an initial loading of the getter, partially desorbing the getter to produce a desorbed mixture which is tritium-enriched, pumping the desorbed mixture into a separate container, the remaining gaseous loading in the getter being deuterium-enriched, desorbing the getter to a substantially greater extent to produce a deuterium-enriched gaseous mixture, and removing the deuterium-enriched mixture into another container. The bulk getter may comprise a zirconium-aluminum alloy, or a zirconium-vanadium-iron alloy. The partial desorption may reduce the loading by approximately fifty percent. The basic procedure may be extended to produce a multistage isotope separator, including at least one additional bulk getter into which the tritium-enriched mixture is absorbed.

Abstract: Tritium and deuterium are separated from a gaseous mixture thereof, derived from a nuclear fusion reactor or some other source, by providing a casing with a bulk getter therein for absorbing the gaseous mixture to produce an initial loading of the getter, partially desorbing the getter to produce a desorbed mixture which is tritium-enriched, pumping the desorbed mixture into a separate container, the remaining gaseous loading in the getter being deuterium-enriched, desorbing the getter to a substantially greater extent to produce a deuterium-enriched gaseous mixture, and removing the deuterium-enriched mixture into another container. The bulk getter may comprise a zirconium-aluminum alloy, or a zirconium-vanadium-iron alloy. The partial desorption may reduce the loading by approximately fifty percent. The basic procedure may be extended to produce a multistage isotope separator, including at least one additional bulk getter into which the tritium-enriched mixture is absorbed.

Abstract: A method of enhancing the thermal desorption of a first isotope of a diatomic gas from a metal comprises the steps of (a) establishing a partial pressure of a second isotope of the diatomic gas in vicinity of the metal; heating the metal to a temperature such that the first isotope is desorbed from the metal; and reducing the partial pressure of the desorbed first isotope while maintaining the partial pressure of the second isotope substantially constant. The method is especially useful for enhancing the desorption of tritium from the Zr-Al getter in a plasma confinement device.