Patents by Inventor Joseph Libera

Joseph Libera has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ALD reactor for coating porous substrates
    Patent number: 11326255
    Abstract: A system and method for improved atomic layer deposition. The system includes a top showerhead plate, a substrate and a bottom showerhead plate. The substrate includes a porous microchannel plate and a substrate holder is positioned in the system to insure flow-through of the gas precursor.
    Type: Grant
    Filed: February 7, 2014
    Date of Patent: May 10, 2022
    Assignee: UChicago Argonne, LLC
    Inventors: Anil U. Mane, Joseph Libera, Jeffrey W. Elam
  • ALD REACTOR FOR COATING POROUS SUBSTRATES
    Publication number: 20140220244
    Abstract: A system and method for improved atomic layer deposition. The system includes a top showerhead plate, a substrate and a bottom showerhead plate. The substrate includes a porous microchannel plate and a substrate holder is positioned in the system to insure flow-through of the gas precursor.
    Type: Application
    Filed: February 7, 2014
    Publication date: August 7, 2014
    Applicant: UChicago Argonne LLC
    Inventors: Anil U. Mane, Joseph Libera, Jeffrey W. Elam