Patents by Inventor Joseph Lindsey Womack

Joseph Lindsey Womack has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition
    Patent number: 10475627
    Abstract: A carrier ring configured to support a substrate during transport to or from a pedestal of a process tool and surrounding the substrate during processing is defined by, an inner annular portion having a first thickness, the inner annular portion defined to be adjacent a substrate support region of the pedestal; a middle annular portion surrounding the inner annular portion, the middle annular portion having a second thickness greater than the first thickness, such that a transition from a top surface of the inner annular portion to a top surface of the middle annular portion defines a first step; an outer annular portion surrounding the middle annular portion, the outer annular portion having a third thickness greater than the second thickness, such that a transition from the top surface of the middle annular portion to a top surface of the outer annular portion defines a second step.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: November 12, 2019
    Assignee: Lam Research Corporation
    Inventors: Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Douglas Keil, Pramod Subramonium, Chunhai Ji, Joseph Lindsey Womack
  • CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECIES AND SUPPRESSION OF LOCAL PARASITIC PLASMA IGNITION
    Publication number: 20170278681
    Abstract: A carrier ring configured to support a substrate during transport to or from a pedestal of a process tool and surrounding the substrate during processing is defined by, an inner annular portion having a first thickness, the inner annular portion defined to be adjacent a substrate support region of the pedestal; a middle annular portion surrounding the inner annular portion, the middle annular portion having a second thickness greater than the first thickness, such that a transition from a top surface of the inner annular portion to a top surface of the middle annular portion defines a first step; an outer annular portion surrounding the middle annular portion, the outer annular portion having a third thickness greater than the second thickness, such that a transition from the top surface of the middle annular portion to a top surface of the outer annular portion defines a second step.
    Type: Application
    Filed: March 25, 2016
    Publication date: September 28, 2017
    Inventors: Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Douglas Keil, Pramod Subramonium, Chunhai Ji, Joseph Lindsey Womack